3/16/2010	9:12:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:12:45 AM	Recipe started at 9:12 AM
3/16/2010	9:12:45 AM	H2 valve closed
3/16/2010	9:12:45 AM	BCl3 valve closed
3/16/2010	9:12:45 AM	PH3 valve closed
3/16/2010	9:12:45 AM	SiCl4 pre valve closed
3/16/2010	9:12:45 AM	SiCl4 post valve closed
3/16/2010	9:12:45 AM	Main Vac valve closed
3/16/2010	9:12:45 AM	Bypass valve closed
3/16/2010	9:12:45 AM	Bubbler valve closed
3/16/2010	9:12:45 AM	Helium valve opened
3/16/2010	9:12:45 AM	Helium MFC set to  500.000000
3/16/2010	9:12:45 AM	H2 MFC set to  0.000000
3/16/2010	9:12:45 AM	BCl3 MFC set to  0.000000
3/16/2010	9:12:45 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:12:45 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:12:45 AM	Tube furnace set to 0
3/16/2010	9:14:06 AM	Helium valve closed
3/16/2010	9:14:06 AM	H2 valve closed
3/16/2010	9:14:06 AM	BCl3 valve closed
3/16/2010	9:14:06 AM	PH3 valve closed
3/16/2010	9:14:06 AM	SiCl4 pre valve closed
3/16/2010	9:14:06 AM	SiCl4 post valve closed
3/16/2010	9:14:06 AM	Main Vac valve closed
3/16/2010	9:14:06 AM	Bypass valve closed
3/16/2010	9:14:06 AM	Bubbler valve closed
3/16/2010	9:14:06 AM	Helium MFC set to  0.000000
3/16/2010	9:14:06 AM	H2 MFC set to  0.000000
3/16/2010	9:14:06 AM	BCl3 MFC set to  0.000000
3/16/2010	9:14:06 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:14:06 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:14:06 AM	Tube furnace set to 0
3/16/2010	9:14:06 AM	Run finished at 9:14 AM
3/16/2010	9:14:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:21:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:21:22 AM	Recipe started at 9:21 AM
3/16/2010	9:21:22 AM	Helium valve closed
3/16/2010	9:21:22 AM	H2 valve closed
3/16/2010	9:21:22 AM	BCl3 valve closed
3/16/2010	9:21:22 AM	PH3 valve closed
3/16/2010	9:21:22 AM	SiCl4 pre valve closed
3/16/2010	9:21:22 AM	SiCl4 post valve closed
3/16/2010	9:21:22 AM	Main Vac valve closed
3/16/2010	9:21:22 AM	Bubbler valve closed
3/16/2010	9:21:22 AM	Bypass valve opened
3/16/2010	9:21:22 AM	Helium MFC set to  0.000000
3/16/2010	9:21:22 AM	H2 MFC set to  0.000000
3/16/2010	9:21:22 AM	BCl3 MFC set to  0.000000
3/16/2010	9:21:22 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:21:22 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:21:22 AM	Tube furnace set to 0
3/16/2010	9:21:53 AM	Helium valve closed
3/16/2010	9:21:53 AM	H2 valve closed
3/16/2010	9:21:53 AM	BCl3 valve closed
3/16/2010	9:21:53 AM	PH3 valve closed
3/16/2010	9:21:53 AM	SiCl4 pre valve closed
3/16/2010	9:21:53 AM	SiCl4 post valve closed
3/16/2010	9:21:53 AM	Bubbler valve closed
3/16/2010	9:21:53 AM	Main Vac valve opened
3/16/2010	9:21:53 AM	Bypass valve opened
3/16/2010	9:21:53 AM	Helium MFC set to  0.000000
3/16/2010	9:21:53 AM	H2 MFC set to  0.000000
3/16/2010	9:21:53 AM	BCl3 MFC set to  0.000000
3/16/2010	9:21:53 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:21:53 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:21:53 AM	Tube furnace set to 0
3/16/2010	9:21:53 AM	Run finished at 9:21 AM
3/16/2010	9:21:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:22:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/16/2010	9:22:14 AM	Recipe started at 9:22 AM
3/16/2010	9:22:14 AM	H2 valve closed
3/16/2010	9:22:14 AM	BCl3 valve closed
3/16/2010	9:22:14 AM	PH3 valve closed
3/16/2010	9:22:14 AM	SiCl4 pre valve closed
3/16/2010	9:22:14 AM	SiCl4 post valve closed
3/16/2010	9:22:14 AM	Main Vac valve closed
3/16/2010	9:22:14 AM	Bypass valve closed
3/16/2010	9:22:14 AM	Bubbler valve closed
3/16/2010	9:22:14 AM	Helium valve opened
3/16/2010	9:22:14 AM	Helium MFC set to  500.000000
3/16/2010	9:22:14 AM	H2 MFC set to  0.000000
3/16/2010	9:22:14 AM	BCl3 MFC set to  0.000000
3/16/2010	9:22:14 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:22:14 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:22:15 AM	Tube furnace set to 0
3/16/2010	9:23:38 AM	Helium valve closed
3/16/2010	9:23:38 AM	H2 valve closed
3/16/2010	9:23:38 AM	BCl3 valve closed
3/16/2010	9:23:38 AM	PH3 valve closed
3/16/2010	9:23:38 AM	SiCl4 pre valve closed
3/16/2010	9:23:38 AM	SiCl4 post valve closed
3/16/2010	9:23:38 AM	Main Vac valve closed
3/16/2010	9:23:38 AM	Bypass valve closed
3/16/2010	9:23:38 AM	Bubbler valve closed
3/16/2010	9:23:38 AM	Helium MFC set to  0.000000
3/16/2010	9:23:38 AM	H2 MFC set to  0.000000
3/16/2010	9:23:38 AM	BCl3 MFC set to  0.000000
3/16/2010	9:23:38 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:23:38 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:23:38 AM	Tube furnace set to 0
3/16/2010	9:23:53 AM	Helium valve closed
3/16/2010	9:23:53 AM	H2 valve closed
3/16/2010	9:23:53 AM	BCl3 valve closed
3/16/2010	9:23:53 AM	PH3 valve closed
3/16/2010	9:23:53 AM	SiCl4 pre valve closed
3/16/2010	9:23:53 AM	SiCl4 post valve closed
3/16/2010	9:23:53 AM	Main Vac valve closed
3/16/2010	9:23:53 AM	Bubbler valve closed
3/16/2010	9:23:53 AM	Bypass valve opened
3/16/2010	9:23:53 AM	Helium MFC set to  0.000000
3/16/2010	9:23:53 AM	H2 MFC set to  0.000000
3/16/2010	9:23:53 AM	BCl3 MFC set to  0.000000
3/16/2010	9:23:53 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:23:53 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:23:53 AM	Tube furnace set to 0
3/16/2010	9:24:15 AM	Helium valve closed
3/16/2010	9:24:15 AM	H2 valve closed
3/16/2010	9:24:15 AM	BCl3 valve closed
3/16/2010	9:24:15 AM	PH3 valve closed
3/16/2010	9:24:15 AM	SiCl4 pre valve closed
3/16/2010	9:24:15 AM	SiCl4 post valve closed
3/16/2010	9:24:15 AM	Bubbler valve closed
3/16/2010	9:24:15 AM	Main Vac valve opened
3/16/2010	9:24:15 AM	Bypass valve opened
3/16/2010	9:24:15 AM	Helium MFC set to  0.000000
3/16/2010	9:24:15 AM	H2 MFC set to  0.000000
3/16/2010	9:24:15 AM	BCl3 MFC set to  0.000000
3/16/2010	9:24:15 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:24:15 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:24:15 AM	Tube furnace set to 0
3/16/2010	9:28:23 AM	Run aborted at 9:28 AM
3/16/2010	9:28:23 AM	Helium valve closed
3/16/2010	9:28:23 AM	H2 valve closed
3/16/2010	9:28:23 AM	BCl3 valve closed
3/16/2010	9:28:23 AM	PH3 valve closed
3/16/2010	9:28:23 AM	SiCl4 pre valve closed
3/16/2010	9:28:23 AM	SiCl4 post valve closed
3/16/2010	9:28:23 AM	Bypass valve closed
3/16/2010	9:28:23 AM	Main Vac valve closed
3/16/2010	9:28:23 AM	Bubbler valve closed
3/16/2010	9:28:23 AM	Helium MFC set to  0.000000
3/16/2010	9:28:23 AM	H2 MFC set to  0.000000
3/16/2010	9:28:23 AM	BCl3 MFC set to  0.000000
3/16/2010	9:28:23 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:28:23 AM	Tube furnace set to 0
3/16/2010	9:28:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/16/2010	9:28:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:28:30 AM	Recipe started at 9:28 AM
3/16/2010	9:28:30 AM	H2 valve closed
3/16/2010	9:28:30 AM	BCl3 valve closed
3/16/2010	9:28:30 AM	PH3 valve closed
3/16/2010	9:28:30 AM	SiCl4 pre valve closed
3/16/2010	9:28:30 AM	SiCl4 post valve closed
3/16/2010	9:28:30 AM	Main Vac valve closed
3/16/2010	9:28:30 AM	Bypass valve closed
3/16/2010	9:28:30 AM	Bubbler valve closed
3/16/2010	9:28:30 AM	Helium valve opened
3/16/2010	9:28:30 AM	Helium MFC set to  500.000000
3/16/2010	9:28:30 AM	H2 MFC set to  0.000000
3/16/2010	9:28:30 AM	BCl3 MFC set to  0.000000
3/16/2010	9:28:30 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:28:30 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:28:30 AM	Tube furnace set to 0
3/16/2010	9:29:50 AM	Helium valve closed
3/16/2010	9:29:50 AM	H2 valve closed
3/16/2010	9:29:50 AM	BCl3 valve closed
3/16/2010	9:29:50 AM	PH3 valve closed
3/16/2010	9:29:50 AM	SiCl4 pre valve closed
3/16/2010	9:29:50 AM	SiCl4 post valve closed
3/16/2010	9:29:50 AM	Main Vac valve closed
3/16/2010	9:29:50 AM	Bypass valve closed
3/16/2010	9:29:50 AM	Bubbler valve closed
3/16/2010	9:29:50 AM	Helium MFC set to  0.000000
3/16/2010	9:29:50 AM	H2 MFC set to  0.000000
3/16/2010	9:29:50 AM	BCl3 MFC set to  0.000000
3/16/2010	9:29:50 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:29:50 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:29:50 AM	Tube furnace set to 0
3/16/2010	9:29:51 AM	Run finished at 9:29 AM
3/16/2010	9:29:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:29:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:29:58 AM	Recipe started at 9:29 AM
3/16/2010	9:29:58 AM	H2 valve closed
3/16/2010	9:29:58 AM	BCl3 valve closed
3/16/2010	9:29:58 AM	PH3 valve closed
3/16/2010	9:29:58 AM	SiCl4 pre valve closed
3/16/2010	9:29:58 AM	SiCl4 post valve closed
3/16/2010	9:29:58 AM	Main Vac valve closed
3/16/2010	9:29:58 AM	Bypass valve closed
3/16/2010	9:29:58 AM	Bubbler valve closed
3/16/2010	9:29:58 AM	Helium valve opened
3/16/2010	9:29:58 AM	Helium MFC set to  500.000000
3/16/2010	9:29:58 AM	H2 MFC set to  0.000000
3/16/2010	9:29:58 AM	BCl3 MFC set to  0.000000
3/16/2010	9:29:58 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:29:58 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:29:58 AM	Tube furnace set to 0
3/16/2010	9:29:59 AM	Helium valve closed
3/16/2010	9:29:59 AM	H2 valve closed
3/16/2010	9:29:59 AM	BCl3 valve closed
3/16/2010	9:29:59 AM	PH3 valve closed
3/16/2010	9:29:59 AM	SiCl4 pre valve closed
3/16/2010	9:29:59 AM	SiCl4 post valve closed
3/16/2010	9:29:59 AM	Main Vac valve closed
3/16/2010	9:29:59 AM	Bypass valve closed
3/16/2010	9:29:59 AM	Bubbler valve closed
3/16/2010	9:29:59 AM	Helium MFC set to  0.000000
3/16/2010	9:29:59 AM	H2 MFC set to  0.000000
3/16/2010	9:29:59 AM	BCl3 MFC set to  0.000000
3/16/2010	9:29:59 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:29:59 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:29:59 AM	Tube furnace set to 0
3/16/2010	9:29:59 AM	Run finished at 9:29 AM
3/16/2010	9:29:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:30:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:30:04 AM	Recipe started at 9:30 AM
3/16/2010	9:30:04 AM	Helium valve closed
3/16/2010	9:30:04 AM	H2 valve closed
3/16/2010	9:30:04 AM	BCl3 valve closed
3/16/2010	9:30:04 AM	PH3 valve closed
3/16/2010	9:30:04 AM	SiCl4 pre valve closed
3/16/2010	9:30:04 AM	SiCl4 post valve closed
3/16/2010	9:30:04 AM	Main Vac valve closed
3/16/2010	9:30:04 AM	Bubbler valve closed
3/16/2010	9:30:04 AM	Bypass valve opened
3/16/2010	9:30:04 AM	Helium MFC set to  0.000000
3/16/2010	9:30:04 AM	H2 MFC set to  0.000000
3/16/2010	9:30:04 AM	BCl3 MFC set to  0.000000
3/16/2010	9:30:04 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:30:04 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:30:04 AM	Tube furnace set to 0
3/16/2010	9:30:26 AM	Helium valve closed
3/16/2010	9:30:26 AM	H2 valve closed
3/16/2010	9:30:26 AM	BCl3 valve closed
3/16/2010	9:30:26 AM	PH3 valve closed
3/16/2010	9:30:26 AM	SiCl4 pre valve closed
3/16/2010	9:30:26 AM	SiCl4 post valve closed
3/16/2010	9:30:26 AM	Bubbler valve closed
3/16/2010	9:30:26 AM	Main Vac valve opened
3/16/2010	9:30:26 AM	Bypass valve opened
3/16/2010	9:30:26 AM	Helium MFC set to  0.000000
3/16/2010	9:30:26 AM	H2 MFC set to  0.000000
3/16/2010	9:30:26 AM	BCl3 MFC set to  0.000000
3/16/2010	9:30:26 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:30:26 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:30:26 AM	Tube furnace set to 0
3/16/2010	9:30:27 AM	Run finished at 9:30 AM
3/16/2010	9:30:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:31:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:31:51 AM	Recipe started at 9:31 AM
3/16/2010	9:31:51 AM	H2 valve closed
3/16/2010	9:31:51 AM	BCl3 valve closed
3/16/2010	9:31:51 AM	PH3 valve closed
3/16/2010	9:31:51 AM	SiCl4 pre valve closed
3/16/2010	9:31:51 AM	SiCl4 post valve closed
3/16/2010	9:31:51 AM	Main Vac valve closed
3/16/2010	9:31:51 AM	Bypass valve closed
3/16/2010	9:31:51 AM	Bubbler valve closed
3/16/2010	9:31:51 AM	Helium valve opened
3/16/2010	9:31:51 AM	Helium MFC set to  500.000000
3/16/2010	9:31:51 AM	H2 MFC set to  0.000000
3/16/2010	9:31:51 AM	BCl3 MFC set to  0.000000
3/16/2010	9:31:51 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:31:51 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:31:51 AM	Tube furnace set to 0
3/16/2010	9:33:12 AM	Helium valve closed
3/16/2010	9:33:12 AM	H2 valve closed
3/16/2010	9:33:12 AM	BCl3 valve closed
3/16/2010	9:33:12 AM	PH3 valve closed
3/16/2010	9:33:12 AM	SiCl4 pre valve closed
3/16/2010	9:33:12 AM	SiCl4 post valve closed
3/16/2010	9:33:12 AM	Main Vac valve closed
3/16/2010	9:33:12 AM	Bypass valve closed
3/16/2010	9:33:12 AM	Bubbler valve closed
3/16/2010	9:33:12 AM	Helium MFC set to  0.000000
3/16/2010	9:33:12 AM	H2 MFC set to  0.000000
3/16/2010	9:33:12 AM	BCl3 MFC set to  0.000000
3/16/2010	9:33:12 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:33:12 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:33:12 AM	Tube furnace set to 0
3/16/2010	9:33:12 AM	Run finished at 9:33 AM
3/16/2010	9:33:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:33:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:33:27 AM	Recipe started at 9:33 AM
3/16/2010	9:33:27 AM	Helium valve closed
3/16/2010	9:33:27 AM	H2 valve closed
3/16/2010	9:33:27 AM	BCl3 valve closed
3/16/2010	9:33:27 AM	PH3 valve closed
3/16/2010	9:33:27 AM	SiCl4 pre valve closed
3/16/2010	9:33:27 AM	SiCl4 post valve closed
3/16/2010	9:33:27 AM	Main Vac valve closed
3/16/2010	9:33:27 AM	Bubbler valve closed
3/16/2010	9:33:27 AM	Bypass valve opened
3/16/2010	9:33:27 AM	Helium MFC set to  0.000000
3/16/2010	9:33:27 AM	H2 MFC set to  0.000000
3/16/2010	9:33:27 AM	BCl3 MFC set to  0.000000
3/16/2010	9:33:27 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:33:27 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:33:27 AM	Tube furnace set to 0
3/16/2010	9:33:49 AM	Helium valve closed
3/16/2010	9:33:49 AM	H2 valve closed
3/16/2010	9:33:49 AM	BCl3 valve closed
3/16/2010	9:33:49 AM	PH3 valve closed
3/16/2010	9:33:50 AM	SiCl4 pre valve closed
3/16/2010	9:33:50 AM	SiCl4 post valve closed
3/16/2010	9:33:50 AM	Bubbler valve closed
3/16/2010	9:33:50 AM	Main Vac valve opened
3/16/2010	9:33:50 AM	Bypass valve opened
3/16/2010	9:33:50 AM	Helium MFC set to  0.000000
3/16/2010	9:33:50 AM	H2 MFC set to  0.000000
3/16/2010	9:33:50 AM	BCl3 MFC set to  0.000000
3/16/2010	9:33:50 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:33:50 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:33:50 AM	Tube furnace set to 0
3/16/2010	9:33:50 AM	Run finished at 9:33 AM
3/16/2010	9:33:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:34:11 AM	Bypass valve closed
3/16/2010	9:34:12 AM	Main Vac valve closed
3/16/2010	9:34:44 AM	Bypass valve opened
3/16/2010	9:34:44 AM	Main Vac valve opened
3/16/2010	9:41:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:41:51 AM	Recipe started at 9:41 AM
3/16/2010	9:41:51 AM	H2 valve closed
3/16/2010	9:41:51 AM	BCl3 valve closed
3/16/2010	9:41:51 AM	PH3 valve closed
3/16/2010	9:41:51 AM	SiCl4 pre valve closed
3/16/2010	9:41:51 AM	SiCl4 post valve closed
3/16/2010	9:41:51 AM	Main Vac valve closed
3/16/2010	9:41:51 AM	Bypass valve closed
3/16/2010	9:41:51 AM	Bubbler valve closed
3/16/2010	9:41:51 AM	Helium valve opened
3/16/2010	9:41:51 AM	Helium MFC set to  500.000000
3/16/2010	9:41:51 AM	H2 MFC set to  0.000000
3/16/2010	9:41:51 AM	BCl3 MFC set to  0.000000
3/16/2010	9:41:51 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:41:51 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:41:51 AM	Tube furnace set to 0
3/16/2010	9:43:12 AM	Helium valve closed
3/16/2010	9:43:12 AM	H2 valve closed
3/16/2010	9:43:12 AM	BCl3 valve closed
3/16/2010	9:43:12 AM	PH3 valve closed
3/16/2010	9:43:12 AM	SiCl4 pre valve closed
3/16/2010	9:43:12 AM	SiCl4 post valve closed
3/16/2010	9:43:12 AM	Main Vac valve closed
3/16/2010	9:43:12 AM	Bypass valve closed
3/16/2010	9:43:12 AM	Bubbler valve closed
3/16/2010	9:43:12 AM	Helium MFC set to  0.000000
3/16/2010	9:43:12 AM	H2 MFC set to  0.000000
3/16/2010	9:43:12 AM	BCl3 MFC set to  0.000000
3/16/2010	9:43:12 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:43:12 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:43:12 AM	Tube furnace set to 0
3/16/2010	9:43:13 AM	Run finished at 9:43 AM
3/16/2010	9:43:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	9:43:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:43:43 AM	Recipe started at 9:43 AM
3/16/2010	9:43:43 AM	Helium valve closed
3/16/2010	9:43:43 AM	H2 valve closed
3/16/2010	9:43:43 AM	BCl3 valve closed
3/16/2010	9:43:43 AM	PH3 valve closed
3/16/2010	9:43:43 AM	SiCl4 pre valve closed
3/16/2010	9:43:43 AM	SiCl4 post valve closed
3/16/2010	9:43:43 AM	Main Vac valve closed
3/16/2010	9:43:43 AM	Bubbler valve closed
3/16/2010	9:43:43 AM	Bypass valve opened
3/16/2010	9:43:43 AM	Helium MFC set to  0.000000
3/16/2010	9:43:43 AM	H2 MFC set to  0.000000
3/16/2010	9:43:43 AM	BCl3 MFC set to  0.000000
3/16/2010	9:43:43 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:43:43 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:43:43 AM	Tube furnace set to 0
3/16/2010	9:44:05 AM	Helium valve closed
3/16/2010	9:44:05 AM	H2 valve closed
3/16/2010	9:44:05 AM	BCl3 valve closed
3/16/2010	9:44:05 AM	PH3 valve closed
3/16/2010	9:44:05 AM	SiCl4 pre valve closed
3/16/2010	9:44:05 AM	SiCl4 post valve closed
3/16/2010	9:44:05 AM	Bubbler valve closed
3/16/2010	9:44:05 AM	Main Vac valve opened
3/16/2010	9:44:05 AM	Bypass valve opened
3/16/2010	9:44:05 AM	Helium MFC set to  0.000000
3/16/2010	9:44:05 AM	H2 MFC set to  0.000000
3/16/2010	9:44:05 AM	BCl3 MFC set to  0.000000
3/16/2010	9:44:05 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:44:05 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:44:05 AM	Tube furnace set to 0
3/16/2010	9:44:05 AM	Run finished at 9:44 AM
3/16/2010	9:44:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	9:45:43 AM	Bypass valve closed
3/16/2010	9:45:43 AM	Main Vac valve closed
3/16/2010	9:45:57 AM	Main Vac valve opened
3/16/2010	9:45:58 AM	Bypass valve opened
3/16/2010	9:49:23 AM	Recipe started at 9:49 AM
3/16/2010	9:49:23 AM	Helium valve closed
3/16/2010	9:49:23 AM	BCl3 valve closed
3/16/2010	9:49:23 AM	PH3 valve closed
3/16/2010	9:49:23 AM	SiCl4 pre valve closed
3/16/2010	9:49:23 AM	SiCl4 post valve closed
3/16/2010	9:49:23 AM	Main Vac valve closed
3/16/2010	9:49:23 AM	Bypass valve closed
3/16/2010	9:49:23 AM	Bubbler valve closed
3/16/2010	9:49:23 AM	H2 valve opened
3/16/2010	9:49:23 AM	Helium MFC set to  0.000000
3/16/2010	9:49:23 AM	H2 MFC set to  500.000000
3/16/2010	9:49:23 AM	BCl3 MFC set to  0.000000
3/16/2010	9:49:23 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:49:23 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:49:23 AM	Tube furnace set to 0
3/16/2010	9:50:42 AM	Helium valve closed
3/16/2010	9:50:42 AM	BCl3 valve closed
3/16/2010	9:50:42 AM	PH3 valve closed
3/16/2010	9:50:42 AM	SiCl4 pre valve closed
3/16/2010	9:50:42 AM	SiCl4 post valve closed
3/16/2010	9:50:42 AM	Main Vac valve closed
3/16/2010	9:50:42 AM	Bypass valve closed
3/16/2010	9:50:42 AM	H2 valve opened
3/16/2010	9:50:42 AM	Bubbler valve opened
3/16/2010	9:50:42 AM	Helium MFC set to  0.000000
3/16/2010	9:50:43 AM	H2 MFC set to  500.000000
3/16/2010	9:50:43 AM	BCl3 MFC set to  0.000000
3/16/2010	9:50:43 AM	SiCl4 MFC set to  0.000000
3/16/2010	9:50:43 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	9:50:43 AM	Tube furnace set to 0
3/16/2010	10:10:43 AM	Helium valve closed
3/16/2010	10:10:43 AM	PH3 valve closed
3/16/2010	10:10:43 AM	Main Vac valve closed
3/16/2010	10:10:43 AM	Bypass valve closed
3/16/2010	10:10:43 AM	H2 valve opened
3/16/2010	10:10:43 AM	BCl3 valve opened
3/16/2010	10:10:43 AM	SiCl4 pre valve opened
3/16/2010	10:10:43 AM	SiCl4 post valve opened
3/16/2010	10:10:43 AM	Bubbler valve opened
3/16/2010	10:10:43 AM	Helium MFC set to  0.000000
3/16/2010	10:10:43 AM	H2 MFC set to  500.000000
3/16/2010	10:10:43 AM	BCl3 MFC set to  35.000000
3/16/2010	10:10:43 AM	SiCl4 MFC set to  325.000000
3/16/2010	10:10:43 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	10:10:43 AM	Tube furnace set to 0
3/16/2010	10:30:43 AM	H2 valve closed
3/16/2010	10:30:43 AM	BCl3 valve closed
3/16/2010	10:30:43 AM	PH3 valve closed
3/16/2010	10:30:43 AM	SiCl4 pre valve closed
3/16/2010	10:30:43 AM	SiCl4 post valve closed
3/16/2010	10:30:43 AM	Main Vac valve closed
3/16/2010	10:30:43 AM	Bypass valve closed
3/16/2010	10:30:43 AM	Helium valve opened
3/16/2010	10:30:43 AM	Bubbler valve opened
3/16/2010	10:30:43 AM	Helium MFC set to  500.000000
3/16/2010	10:30:43 AM	H2 MFC set to  0.000000
3/16/2010	10:30:43 AM	BCl3 MFC set to  0.000000
3/16/2010	10:30:43 AM	SiCl4 MFC set to  0.000000
3/16/2010	10:30:43 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	10:30:43 AM	Tube furnace set to 0
3/16/2010	10:50:43 AM	Helium valve closed
3/16/2010	10:50:43 AM	H2 valve closed
3/16/2010	10:50:43 AM	BCl3 valve closed
3/16/2010	10:50:43 AM	PH3 valve closed
3/16/2010	10:50:43 AM	SiCl4 pre valve closed
3/16/2010	10:50:43 AM	SiCl4 post valve closed
3/16/2010	10:50:43 AM	Main Vac valve closed
3/16/2010	10:50:43 AM	Bypass valve closed
3/16/2010	10:50:44 AM	Bubbler valve closed
3/16/2010	10:50:44 AM	Helium MFC set to  0.000000
3/16/2010	10:50:44 AM	H2 MFC set to  0.000000
3/16/2010	10:50:44 AM	BCl3 MFC set to  0.000000
3/16/2010	10:50:44 AM	SiCl4 MFC set to  0.000000
3/16/2010	10:50:44 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	10:50:44 AM	Tube furnace set to 0
3/16/2010	10:50:44 AM	Run finished at 10:50 AM
3/16/2010	11:06:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	11:06:51 AM	Recipe started at 11:06 AM
3/16/2010	11:06:51 AM	Helium valve closed
3/16/2010	11:06:51 AM	H2 valve closed
3/16/2010	11:06:51 AM	BCl3 valve closed
3/16/2010	11:06:51 AM	PH3 valve closed
3/16/2010	11:06:51 AM	SiCl4 pre valve closed
3/16/2010	11:06:51 AM	SiCl4 post valve closed
3/16/2010	11:06:51 AM	Main Vac valve closed
3/16/2010	11:06:51 AM	Bubbler valve closed
3/16/2010	11:06:51 AM	Bypass valve opened
3/16/2010	11:06:51 AM	Helium MFC set to  0.000000
3/16/2010	11:06:51 AM	H2 MFC set to  0.000000
3/16/2010	11:06:51 AM	BCl3 MFC set to  0.000000
3/16/2010	11:06:51 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:06:51 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:06:51 AM	Tube furnace set to 0
3/16/2010	11:07:23 AM	Helium valve closed
3/16/2010	11:07:23 AM	H2 valve closed
3/16/2010	11:07:23 AM	BCl3 valve closed
3/16/2010	11:07:23 AM	PH3 valve closed
3/16/2010	11:07:23 AM	SiCl4 pre valve closed
3/16/2010	11:07:23 AM	SiCl4 post valve closed
3/16/2010	11:07:23 AM	Bubbler valve closed
3/16/2010	11:07:23 AM	Main Vac valve opened
3/16/2010	11:07:23 AM	Bypass valve opened
3/16/2010	11:07:23 AM	Helium MFC set to  0.000000
3/16/2010	11:07:23 AM	H2 MFC set to  0.000000
3/16/2010	11:07:23 AM	BCl3 MFC set to  0.000000
3/16/2010	11:07:23 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:07:23 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:07:23 AM	Tube furnace set to 0
3/16/2010	11:07:23 AM	Run finished at 11:07 AM
3/16/2010	11:07:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	11:07:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	11:07:51 AM	Recipe started at 11:07 AM
3/16/2010	11:07:51 AM	H2 valve closed
3/16/2010	11:07:51 AM	BCl3 valve closed
3/16/2010	11:07:51 AM	PH3 valve closed
3/16/2010	11:07:51 AM	SiCl4 pre valve closed
3/16/2010	11:07:51 AM	SiCl4 post valve closed
3/16/2010	11:07:51 AM	Main Vac valve closed
3/16/2010	11:07:51 AM	Bypass valve closed
3/16/2010	11:07:51 AM	Bubbler valve closed
3/16/2010	11:07:51 AM	Helium valve opened
3/16/2010	11:07:51 AM	Helium MFC set to  500.000000
3/16/2010	11:07:51 AM	H2 MFC set to  0.000000
3/16/2010	11:07:51 AM	BCl3 MFC set to  0.000000
3/16/2010	11:07:51 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:07:51 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:07:51 AM	Tube furnace set to 0
3/16/2010	11:09:11 AM	Helium valve closed
3/16/2010	11:09:11 AM	H2 valve closed
3/16/2010	11:09:11 AM	BCl3 valve closed
3/16/2010	11:09:11 AM	PH3 valve closed
3/16/2010	11:09:11 AM	SiCl4 pre valve closed
3/16/2010	11:09:11 AM	SiCl4 post valve closed
3/16/2010	11:09:11 AM	Main Vac valve closed
3/16/2010	11:09:11 AM	Bypass valve closed
3/16/2010	11:09:11 AM	Bubbler valve closed
3/16/2010	11:09:11 AM	Helium MFC set to  0.000000
3/16/2010	11:09:11 AM	H2 MFC set to  0.000000
3/16/2010	11:09:11 AM	BCl3 MFC set to  0.000000
3/16/2010	11:09:11 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:09:11 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:09:11 AM	Tube furnace set to 0
3/16/2010	11:09:12 AM	Run finished at 11:09 AM
3/16/2010	11:09:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	11:09:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	11:09:17 AM	Recipe started at 11:09 AM
3/16/2010	11:09:17 AM	Helium valve closed
3/16/2010	11:09:17 AM	H2 valve closed
3/16/2010	11:09:17 AM	BCl3 valve closed
3/16/2010	11:09:17 AM	PH3 valve closed
3/16/2010	11:09:17 AM	SiCl4 pre valve closed
3/16/2010	11:09:17 AM	SiCl4 post valve closed
3/16/2010	11:09:17 AM	Main Vac valve closed
3/16/2010	11:09:17 AM	Bubbler valve closed
3/16/2010	11:09:17 AM	Bypass valve opened
3/16/2010	11:09:17 AM	Helium MFC set to  0.000000
3/16/2010	11:09:17 AM	H2 MFC set to  0.000000
3/16/2010	11:09:17 AM	BCl3 MFC set to  0.000000
3/16/2010	11:09:17 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:09:17 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:09:17 AM	Tube furnace set to 0
3/16/2010	11:09:39 AM	Helium valve closed
3/16/2010	11:09:39 AM	H2 valve closed
3/16/2010	11:09:39 AM	BCl3 valve closed
3/16/2010	11:09:39 AM	PH3 valve closed
3/16/2010	11:09:39 AM	SiCl4 pre valve closed
3/16/2010	11:09:39 AM	SiCl4 post valve closed
3/16/2010	11:09:39 AM	Bubbler valve closed
3/16/2010	11:09:39 AM	Main Vac valve opened
3/16/2010	11:09:39 AM	Bypass valve opened
3/16/2010	11:09:39 AM	Helium MFC set to  0.000000
3/16/2010	11:09:39 AM	H2 MFC set to  0.000000
3/16/2010	11:09:39 AM	BCl3 MFC set to  0.000000
3/16/2010	11:09:39 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:09:39 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:09:39 AM	Tube furnace set to 0
3/16/2010	11:09:40 AM	Run finished at 11:09 AM
3/16/2010	11:09:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	11:10:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	11:10:29 AM	Recipe started at 11:10 AM
3/16/2010	11:10:29 AM	H2 valve closed
3/16/2010	11:10:29 AM	BCl3 valve closed
3/16/2010	11:10:29 AM	PH3 valve closed
3/16/2010	11:10:29 AM	SiCl4 pre valve closed
3/16/2010	11:10:29 AM	SiCl4 post valve closed
3/16/2010	11:10:29 AM	Main Vac valve closed
3/16/2010	11:10:29 AM	Bypass valve closed
3/16/2010	11:10:29 AM	Bubbler valve closed
3/16/2010	11:10:29 AM	Helium valve opened
3/16/2010	11:10:29 AM	Helium MFC set to  500.000000
3/16/2010	11:10:29 AM	H2 MFC set to  0.000000
3/16/2010	11:10:29 AM	BCl3 MFC set to  0.000000
3/16/2010	11:10:29 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:10:29 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:10:29 AM	Tube furnace set to 0
3/16/2010	11:11:49 AM	Helium valve closed
3/16/2010	11:11:49 AM	H2 valve closed
3/16/2010	11:11:49 AM	BCl3 valve closed
3/16/2010	11:11:49 AM	PH3 valve closed
3/16/2010	11:11:49 AM	SiCl4 pre valve closed
3/16/2010	11:11:49 AM	SiCl4 post valve closed
3/16/2010	11:11:49 AM	Main Vac valve closed
3/16/2010	11:11:49 AM	Bypass valve closed
3/16/2010	11:11:49 AM	Bubbler valve closed
3/16/2010	11:11:49 AM	Helium MFC set to  0.000000
3/16/2010	11:11:49 AM	H2 MFC set to  0.000000
3/16/2010	11:11:49 AM	BCl3 MFC set to  0.000000
3/16/2010	11:11:49 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:11:49 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:11:49 AM	Tube furnace set to 0
3/16/2010	11:11:49 AM	Run finished at 11:11 AM
3/16/2010	11:11:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	11:11:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	11:11:54 AM	Recipe started at 11:11 AM
3/16/2010	11:11:54 AM	Helium valve closed
3/16/2010	11:11:54 AM	H2 valve closed
3/16/2010	11:11:54 AM	BCl3 valve closed
3/16/2010	11:11:54 AM	PH3 valve closed
3/16/2010	11:11:54 AM	SiCl4 pre valve closed
3/16/2010	11:11:54 AM	SiCl4 post valve closed
3/16/2010	11:11:54 AM	Main Vac valve closed
3/16/2010	11:11:54 AM	Bubbler valve closed
3/16/2010	11:11:54 AM	Bypass valve opened
3/16/2010	11:11:54 AM	Helium MFC set to  0.000000
3/16/2010	11:11:54 AM	H2 MFC set to  0.000000
3/16/2010	11:11:54 AM	BCl3 MFC set to  0.000000
3/16/2010	11:11:54 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:11:54 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:11:54 AM	Tube furnace set to 0
3/16/2010	11:12:16 AM	Helium valve closed
3/16/2010	11:12:16 AM	H2 valve closed
3/16/2010	11:12:16 AM	BCl3 valve closed
3/16/2010	11:12:17 AM	PH3 valve closed
3/16/2010	11:12:17 AM	SiCl4 pre valve closed
3/16/2010	11:12:17 AM	SiCl4 post valve closed
3/16/2010	11:12:17 AM	Bubbler valve closed
3/16/2010	11:12:17 AM	Main Vac valve opened
3/16/2010	11:12:17 AM	Bypass valve opened
3/16/2010	11:12:17 AM	Helium MFC set to  0.000000
3/16/2010	11:12:17 AM	H2 MFC set to  0.000000
3/16/2010	11:12:17 AM	BCl3 MFC set to  0.000000
3/16/2010	11:12:17 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:12:17 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:12:17 AM	Tube furnace set to 0
3/16/2010	11:12:17 AM	Run finished at 11:12 AM
3/16/2010	11:12:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	11:30:03 AM	Bypass valve closed
3/16/2010	11:30:03 AM	Main Vac valve closed
3/16/2010	11:30:21 AM	Bypass valve opened
3/16/2010	11:30:22 AM	Main Vac valve opened
3/16/2010	11:30:51 AM	Recipe started at 11:30 AM
3/16/2010	11:30:51 AM	Helium valve closed
3/16/2010	11:30:51 AM	BCl3 valve closed
3/16/2010	11:30:51 AM	PH3 valve closed
3/16/2010	11:30:51 AM	SiCl4 pre valve closed
3/16/2010	11:30:51 AM	SiCl4 post valve closed
3/16/2010	11:30:51 AM	Main Vac valve closed
3/16/2010	11:30:51 AM	Bypass valve closed
3/16/2010	11:30:51 AM	Bubbler valve closed
3/16/2010	11:30:51 AM	H2 valve opened
3/16/2010	11:30:51 AM	Helium MFC set to  0.000000
3/16/2010	11:30:51 AM	H2 MFC set to  500.000000
3/16/2010	11:30:51 AM	BCl3 MFC set to  0.000000
3/16/2010	11:30:51 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:30:51 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:30:51 AM	Tube furnace set to 0
3/16/2010	11:32:10 AM	Helium valve closed
3/16/2010	11:32:10 AM	BCl3 valve closed
3/16/2010	11:32:10 AM	PH3 valve closed
3/16/2010	11:32:10 AM	SiCl4 pre valve closed
3/16/2010	11:32:10 AM	SiCl4 post valve closed
3/16/2010	11:32:10 AM	Main Vac valve closed
3/16/2010	11:32:10 AM	Bypass valve closed
3/16/2010	11:32:10 AM	H2 valve opened
3/16/2010	11:32:10 AM	Bubbler valve opened
3/16/2010	11:32:10 AM	Helium MFC set to  0.000000
3/16/2010	11:32:10 AM	H2 MFC set to  500.000000
3/16/2010	11:32:10 AM	BCl3 MFC set to  0.000000
3/16/2010	11:32:10 AM	SiCl4 MFC set to  0.000000
3/16/2010	11:32:10 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:32:10 AM	Tube furnace set to 0
3/16/2010	11:52:10 AM	Helium valve closed
3/16/2010	11:52:10 AM	PH3 valve closed
3/16/2010	11:52:10 AM	Main Vac valve closed
3/16/2010	11:52:10 AM	Bypass valve closed
3/16/2010	11:52:10 AM	H2 valve opened
3/16/2010	11:52:10 AM	BCl3 valve opened
3/16/2010	11:52:10 AM	SiCl4 pre valve opened
3/16/2010	11:52:10 AM	SiCl4 post valve opened
3/16/2010	11:52:10 AM	Bubbler valve opened
3/16/2010	11:52:10 AM	Helium MFC set to  0.000000
3/16/2010	11:52:10 AM	H2 MFC set to  500.000000
3/16/2010	11:52:10 AM	BCl3 MFC set to  35.000000
3/16/2010	11:52:10 AM	SiCl4 MFC set to  325.000000
3/16/2010	11:52:10 AM	Bypass solenoid MFC set to  0.000000
3/16/2010	11:52:10 AM	Tube furnace set to 0
3/16/2010	12:12:10 PM	H2 valve closed
3/16/2010	12:12:10 PM	BCl3 valve closed
3/16/2010	12:12:10 PM	PH3 valve closed
3/16/2010	12:12:10 PM	SiCl4 pre valve closed
3/16/2010	12:12:10 PM	SiCl4 post valve closed
3/16/2010	12:12:10 PM	Main Vac valve closed
3/16/2010	12:12:10 PM	Bypass valve closed
3/16/2010	12:12:10 PM	Helium valve opened
3/16/2010	12:12:10 PM	Bubbler valve opened
3/16/2010	12:12:10 PM	Helium MFC set to  500.000000
3/16/2010	12:12:10 PM	H2 MFC set to  0.000000
3/16/2010	12:12:10 PM	BCl3 MFC set to  0.000000
3/16/2010	12:12:10 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:12:10 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:12:10 PM	Tube furnace set to 0
3/16/2010	12:32:10 PM	Helium valve closed
3/16/2010	12:32:10 PM	H2 valve closed
3/16/2010	12:32:10 PM	BCl3 valve closed
3/16/2010	12:32:10 PM	PH3 valve closed
3/16/2010	12:32:11 PM	SiCl4 pre valve closed
3/16/2010	12:32:11 PM	SiCl4 post valve closed
3/16/2010	12:32:11 PM	Main Vac valve closed
3/16/2010	12:32:11 PM	Bypass valve closed
3/16/2010	12:32:11 PM	Bubbler valve closed
3/16/2010	12:32:11 PM	Helium MFC set to  0.000000
3/16/2010	12:32:11 PM	H2 MFC set to  0.000000
3/16/2010	12:32:11 PM	BCl3 MFC set to  0.000000
3/16/2010	12:32:11 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:32:11 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:32:11 PM	Tube furnace set to 0
3/16/2010	12:32:11 PM	Run finished at 12:32 PM
3/16/2010	12:35:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	12:36:00 PM	Recipe started at 12:35 PM
3/16/2010	12:36:00 PM	Helium valve closed
3/16/2010	12:36:00 PM	H2 valve closed
3/16/2010	12:36:00 PM	BCl3 valve closed
3/16/2010	12:36:00 PM	PH3 valve closed
3/16/2010	12:36:00 PM	SiCl4 pre valve closed
3/16/2010	12:36:00 PM	SiCl4 post valve closed
3/16/2010	12:36:00 PM	Main Vac valve closed
3/16/2010	12:36:00 PM	Bubbler valve closed
3/16/2010	12:36:00 PM	Bypass valve opened
3/16/2010	12:36:00 PM	Helium MFC set to  0.000000
3/16/2010	12:36:00 PM	H2 MFC set to  0.000000
3/16/2010	12:36:00 PM	BCl3 MFC set to  0.000000
3/16/2010	12:36:00 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:36:00 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:36:00 PM	Tube furnace set to 0
3/16/2010	12:36:30 PM	Helium valve closed
3/16/2010	12:36:30 PM	H2 valve closed
3/16/2010	12:36:30 PM	BCl3 valve closed
3/16/2010	12:36:30 PM	PH3 valve closed
3/16/2010	12:36:30 PM	SiCl4 pre valve closed
3/16/2010	12:36:30 PM	SiCl4 post valve closed
3/16/2010	12:36:30 PM	Bubbler valve closed
3/16/2010	12:36:30 PM	Main Vac valve opened
3/16/2010	12:36:30 PM	Bypass valve opened
3/16/2010	12:36:30 PM	Helium MFC set to  0.000000
3/16/2010	12:36:30 PM	H2 MFC set to  0.000000
3/16/2010	12:36:30 PM	BCl3 MFC set to  0.000000
3/16/2010	12:36:30 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:36:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:36:30 PM	Tube furnace set to 0
3/16/2010	12:36:31 PM	Run finished at 12:36 PM
3/16/2010	12:36:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	12:37:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	12:37:21 PM	Recipe started at 12:37 PM
3/16/2010	12:37:21 PM	H2 valve closed
3/16/2010	12:37:21 PM	BCl3 valve closed
3/16/2010	12:37:21 PM	PH3 valve closed
3/16/2010	12:37:21 PM	SiCl4 pre valve closed
3/16/2010	12:37:21 PM	SiCl4 post valve closed
3/16/2010	12:37:21 PM	Main Vac valve closed
3/16/2010	12:37:21 PM	Bypass valve closed
3/16/2010	12:37:21 PM	Bubbler valve closed
3/16/2010	12:37:21 PM	Helium valve opened
3/16/2010	12:37:21 PM	Helium MFC set to  500.000000
3/16/2010	12:37:21 PM	H2 MFC set to  0.000000
3/16/2010	12:37:21 PM	BCl3 MFC set to  0.000000
3/16/2010	12:37:21 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:37:21 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:37:21 PM	Tube furnace set to 0
3/16/2010	12:38:40 PM	Helium valve closed
3/16/2010	12:38:40 PM	H2 valve closed
3/16/2010	12:38:40 PM	BCl3 valve closed
3/16/2010	12:38:40 PM	PH3 valve closed
3/16/2010	12:38:40 PM	SiCl4 pre valve closed
3/16/2010	12:38:40 PM	SiCl4 post valve closed
3/16/2010	12:38:40 PM	Main Vac valve closed
3/16/2010	12:38:40 PM	Bypass valve closed
3/16/2010	12:38:40 PM	Bubbler valve closed
3/16/2010	12:38:40 PM	Helium MFC set to  0.000000
3/16/2010	12:38:40 PM	H2 MFC set to  0.000000
3/16/2010	12:38:40 PM	BCl3 MFC set to  0.000000
3/16/2010	12:38:40 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:38:40 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:38:40 PM	Tube furnace set to 0
3/16/2010	12:38:40 PM	Run finished at 12:38 PM
3/16/2010	12:38:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	12:38:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	12:38:43 PM	Recipe started at 12:38 PM
3/16/2010	12:38:43 PM	Helium valve closed
3/16/2010	12:38:43 PM	H2 valve closed
3/16/2010	12:38:43 PM	BCl3 valve closed
3/16/2010	12:38:43 PM	PH3 valve closed
3/16/2010	12:38:43 PM	SiCl4 pre valve closed
3/16/2010	12:38:43 PM	SiCl4 post valve closed
3/16/2010	12:38:43 PM	Main Vac valve closed
3/16/2010	12:38:43 PM	Bubbler valve closed
3/16/2010	12:38:43 PM	Bypass valve opened
3/16/2010	12:38:43 PM	Helium MFC set to  0.000000
3/16/2010	12:38:43 PM	H2 MFC set to  0.000000
3/16/2010	12:38:43 PM	BCl3 MFC set to  0.000000
3/16/2010	12:38:43 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:38:43 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:38:43 PM	Tube furnace set to 0
3/16/2010	12:39:05 PM	Helium valve closed
3/16/2010	12:39:05 PM	H2 valve closed
3/16/2010	12:39:05 PM	BCl3 valve closed
3/16/2010	12:39:05 PM	PH3 valve closed
3/16/2010	12:39:05 PM	SiCl4 pre valve closed
3/16/2010	12:39:05 PM	SiCl4 post valve closed
3/16/2010	12:39:05 PM	Bubbler valve closed
3/16/2010	12:39:05 PM	Main Vac valve opened
3/16/2010	12:39:05 PM	Bypass valve opened
3/16/2010	12:39:05 PM	Helium MFC set to  0.000000
3/16/2010	12:39:05 PM	H2 MFC set to  0.000000
3/16/2010	12:39:05 PM	BCl3 MFC set to  0.000000
3/16/2010	12:39:05 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:39:05 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:39:05 PM	Tube furnace set to 0
3/16/2010	12:39:05 PM	Run finished at 12:39 PM
3/16/2010	12:39:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	12:39:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	12:39:47 PM	Recipe started at 12:39 PM
3/16/2010	12:39:47 PM	H2 valve closed
3/16/2010	12:39:47 PM	BCl3 valve closed
3/16/2010	12:39:47 PM	PH3 valve closed
3/16/2010	12:39:47 PM	SiCl4 pre valve closed
3/16/2010	12:39:47 PM	SiCl4 post valve closed
3/16/2010	12:39:47 PM	Main Vac valve closed
3/16/2010	12:39:47 PM	Bypass valve closed
3/16/2010	12:39:47 PM	Bubbler valve closed
3/16/2010	12:39:47 PM	Helium valve opened
3/16/2010	12:39:47 PM	Helium MFC set to  500.000000
3/16/2010	12:39:47 PM	H2 MFC set to  0.000000
3/16/2010	12:39:47 PM	BCl3 MFC set to  0.000000
3/16/2010	12:39:47 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:39:47 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:39:47 PM	Tube furnace set to 0
3/16/2010	12:41:05 PM	Helium valve closed
3/16/2010	12:41:05 PM	H2 valve closed
3/16/2010	12:41:05 PM	BCl3 valve closed
3/16/2010	12:41:05 PM	PH3 valve closed
3/16/2010	12:41:05 PM	SiCl4 pre valve closed
3/16/2010	12:41:05 PM	SiCl4 post valve closed
3/16/2010	12:41:05 PM	Main Vac valve closed
3/16/2010	12:41:05 PM	Bypass valve closed
3/16/2010	12:41:05 PM	Bubbler valve closed
3/16/2010	12:41:05 PM	Helium MFC set to  0.000000
3/16/2010	12:41:05 PM	H2 MFC set to  0.000000
3/16/2010	12:41:05 PM	BCl3 MFC set to  0.000000
3/16/2010	12:41:05 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:41:05 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:41:05 PM	Tube furnace set to 0
3/16/2010	12:41:06 PM	Run finished at 12:41 PM
3/16/2010	12:41:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	12:41:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	12:41:09 PM	Recipe started at 12:41 PM
3/16/2010	12:41:09 PM	Helium valve closed
3/16/2010	12:41:09 PM	H2 valve closed
3/16/2010	12:41:09 PM	BCl3 valve closed
3/16/2010	12:41:09 PM	PH3 valve closed
3/16/2010	12:41:09 PM	SiCl4 pre valve closed
3/16/2010	12:41:09 PM	SiCl4 post valve closed
3/16/2010	12:41:09 PM	Main Vac valve closed
3/16/2010	12:41:09 PM	Bubbler valve closed
3/16/2010	12:41:09 PM	Bypass valve opened
3/16/2010	12:41:09 PM	Helium MFC set to  0.000000
3/16/2010	12:41:09 PM	H2 MFC set to  0.000000
3/16/2010	12:41:09 PM	BCl3 MFC set to  0.000000
3/16/2010	12:41:09 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:41:09 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:41:09 PM	Tube furnace set to 0
3/16/2010	12:41:31 PM	Helium valve closed
3/16/2010	12:41:31 PM	H2 valve closed
3/16/2010	12:41:31 PM	BCl3 valve closed
3/16/2010	12:41:31 PM	PH3 valve closed
3/16/2010	12:41:31 PM	SiCl4 pre valve closed
3/16/2010	12:41:31 PM	SiCl4 post valve closed
3/16/2010	12:41:31 PM	Bubbler valve closed
3/16/2010	12:41:31 PM	Main Vac valve opened
3/16/2010	12:41:31 PM	Bypass valve opened
3/16/2010	12:41:31 PM	Helium MFC set to  0.000000
3/16/2010	12:41:31 PM	H2 MFC set to  0.000000
3/16/2010	12:41:31 PM	BCl3 MFC set to  0.000000
3/16/2010	12:41:31 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:41:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:41:31 PM	Tube furnace set to 0
3/16/2010	12:41:31 PM	Run finished at 12:41 PM
3/16/2010	12:41:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	12:53:03 PM	Bypass valve closed
3/16/2010	12:53:04 PM	Main Vac valve closed
3/16/2010	12:53:29 PM	Bypass valve opened
3/16/2010	12:53:30 PM	Main Vac valve opened
3/16/2010	12:53:58 PM	Recipe started at 12:53 PM
3/16/2010	12:53:58 PM	Helium valve closed
3/16/2010	12:53:58 PM	BCl3 valve closed
3/16/2010	12:53:58 PM	PH3 valve closed
3/16/2010	12:53:58 PM	SiCl4 pre valve closed
3/16/2010	12:53:58 PM	SiCl4 post valve closed
3/16/2010	12:53:58 PM	Main Vac valve closed
3/16/2010	12:53:58 PM	Bypass valve closed
3/16/2010	12:53:58 PM	Bubbler valve closed
3/16/2010	12:53:58 PM	H2 valve opened
3/16/2010	12:53:58 PM	Helium MFC set to  0.000000
3/16/2010	12:53:58 PM	H2 MFC set to  500.000000
3/16/2010	12:53:58 PM	BCl3 MFC set to  0.000000
3/16/2010	12:53:58 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:53:58 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:53:58 PM	Tube furnace set to 0
3/16/2010	12:55:21 PM	Helium valve closed
3/16/2010	12:55:21 PM	BCl3 valve closed
3/16/2010	12:55:21 PM	PH3 valve closed
3/16/2010	12:55:21 PM	SiCl4 pre valve closed
3/16/2010	12:55:21 PM	SiCl4 post valve closed
3/16/2010	12:55:21 PM	Main Vac valve closed
3/16/2010	12:55:21 PM	Bypass valve closed
3/16/2010	12:55:21 PM	H2 valve opened
3/16/2010	12:55:21 PM	Bubbler valve opened
3/16/2010	12:55:21 PM	Helium MFC set to  0.000000
3/16/2010	12:55:21 PM	H2 MFC set to  500.000000
3/16/2010	12:55:21 PM	BCl3 MFC set to  0.000000
3/16/2010	12:55:21 PM	SiCl4 MFC set to  0.000000
3/16/2010	12:55:21 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	12:55:21 PM	Tube furnace set to 0
3/16/2010	1:15:21 PM	Helium valve closed
3/16/2010	1:15:21 PM	PH3 valve closed
3/16/2010	1:15:21 PM	Main Vac valve closed
3/16/2010	1:15:21 PM	Bypass valve closed
3/16/2010	1:15:21 PM	H2 valve opened
3/16/2010	1:15:21 PM	BCl3 valve opened
3/16/2010	1:15:21 PM	SiCl4 pre valve opened
3/16/2010	1:15:21 PM	SiCl4 post valve opened
3/16/2010	1:15:21 PM	Bubbler valve opened
3/16/2010	1:15:21 PM	Helium MFC set to  0.000000
3/16/2010	1:15:21 PM	H2 MFC set to  500.000000
3/16/2010	1:15:21 PM	BCl3 MFC set to  35.000000
3/16/2010	1:15:21 PM	SiCl4 MFC set to  400.000000
3/16/2010	1:15:21 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	1:15:21 PM	Tube furnace set to 0
3/16/2010	1:35:22 PM	H2 valve closed
3/16/2010	1:35:22 PM	BCl3 valve closed
3/16/2010	1:35:22 PM	PH3 valve closed
3/16/2010	1:35:22 PM	SiCl4 pre valve closed
3/16/2010	1:35:22 PM	SiCl4 post valve closed
3/16/2010	1:35:22 PM	Main Vac valve closed
3/16/2010	1:35:22 PM	Bypass valve closed
3/16/2010	1:35:22 PM	Helium valve opened
3/16/2010	1:35:22 PM	Bubbler valve opened
3/16/2010	1:35:22 PM	Helium MFC set to  500.000000
3/16/2010	1:35:22 PM	H2 MFC set to  0.000000
3/16/2010	1:35:22 PM	BCl3 MFC set to  0.000000
3/16/2010	1:35:22 PM	SiCl4 MFC set to  0.000000
3/16/2010	1:35:22 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	1:35:22 PM	Tube furnace set to 0
3/16/2010	1:55:22 PM	Helium valve closed
3/16/2010	1:55:22 PM	H2 valve closed
3/16/2010	1:55:22 PM	BCl3 valve closed
3/16/2010	1:55:22 PM	PH3 valve closed
3/16/2010	1:55:22 PM	SiCl4 pre valve closed
3/16/2010	1:55:22 PM	SiCl4 post valve closed
3/16/2010	1:55:22 PM	Main Vac valve closed
3/16/2010	1:55:22 PM	Bypass valve closed
3/16/2010	1:55:22 PM	Bubbler valve closed
3/16/2010	1:55:22 PM	Helium MFC set to  0.000000
3/16/2010	1:55:22 PM	H2 MFC set to  0.000000
3/16/2010	1:55:22 PM	BCl3 MFC set to  0.000000
3/16/2010	1:55:22 PM	SiCl4 MFC set to  0.000000
3/16/2010	1:55:22 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	1:55:22 PM	Tube furnace set to 0
3/16/2010	1:55:22 PM	Run finished at 1:55 PM
3/16/2010	1:58:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	1:58:29 PM	Recipe started at 1:58 PM
3/16/2010	1:58:29 PM	Helium valve closed
3/16/2010	1:58:29 PM	H2 valve closed
3/16/2010	1:58:29 PM	BCl3 valve closed
3/16/2010	1:58:29 PM	PH3 valve closed
3/16/2010	1:58:29 PM	SiCl4 pre valve closed
3/16/2010	1:58:29 PM	SiCl4 post valve closed
3/16/2010	1:58:29 PM	Main Vac valve closed
3/16/2010	1:58:29 PM	Bubbler valve closed
3/16/2010	1:58:29 PM	Bypass valve opened
3/16/2010	1:58:29 PM	Helium MFC set to  0.000000
3/16/2010	1:58:29 PM	H2 MFC set to  0.000000
3/16/2010	1:58:29 PM	BCl3 MFC set to  0.000000
3/16/2010	1:58:29 PM	SiCl4 MFC set to  0.000000
3/16/2010	1:58:29 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	1:58:29 PM	Tube furnace set to 0
3/16/2010	1:59:00 PM	Helium valve closed
3/16/2010	1:59:00 PM	H2 valve closed
3/16/2010	1:59:00 PM	BCl3 valve closed
3/16/2010	1:59:00 PM	PH3 valve closed
3/16/2010	1:59:00 PM	SiCl4 pre valve closed
3/16/2010	1:59:00 PM	SiCl4 post valve closed
3/16/2010	1:59:00 PM	Bubbler valve closed
3/16/2010	1:59:00 PM	Main Vac valve opened
3/16/2010	1:59:00 PM	Bypass valve opened
3/16/2010	1:59:00 PM	Helium MFC set to  0.000000
3/16/2010	1:59:00 PM	H2 MFC set to  0.000000
3/16/2010	1:59:00 PM	BCl3 MFC set to  0.000000
3/16/2010	1:59:00 PM	SiCl4 MFC set to  0.000000
3/16/2010	1:59:00 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	1:59:00 PM	Tube furnace set to 0
3/16/2010	1:59:00 PM	Run finished at 1:59 PM
3/16/2010	1:59:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	2:06:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	2:06:30 PM	Recipe started at 2:06 PM
3/16/2010	2:06:30 PM	H2 valve closed
3/16/2010	2:06:30 PM	BCl3 valve closed
3/16/2010	2:06:30 PM	PH3 valve closed
3/16/2010	2:06:30 PM	SiCl4 pre valve closed
3/16/2010	2:06:30 PM	SiCl4 post valve closed
3/16/2010	2:06:30 PM	Main Vac valve closed
3/16/2010	2:06:30 PM	Bypass valve closed
3/16/2010	2:06:30 PM	Bubbler valve closed
3/16/2010	2:06:30 PM	Helium valve opened
3/16/2010	2:06:30 PM	Helium MFC set to  500.000000
3/16/2010	2:06:30 PM	H2 MFC set to  0.000000
3/16/2010	2:06:30 PM	BCl3 MFC set to  0.000000
3/16/2010	2:06:30 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:06:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:06:30 PM	Tube furnace set to 0
3/16/2010	2:07:49 PM	Helium valve closed
3/16/2010	2:07:49 PM	H2 valve closed
3/16/2010	2:07:49 PM	BCl3 valve closed
3/16/2010	2:07:49 PM	PH3 valve closed
3/16/2010	2:07:49 PM	SiCl4 pre valve closed
3/16/2010	2:07:49 PM	SiCl4 post valve closed
3/16/2010	2:07:49 PM	Main Vac valve closed
3/16/2010	2:07:49 PM	Bypass valve closed
3/16/2010	2:07:49 PM	Bubbler valve closed
3/16/2010	2:07:49 PM	Helium MFC set to  0.000000
3/16/2010	2:07:49 PM	H2 MFC set to  0.000000
3/16/2010	2:07:49 PM	BCl3 MFC set to  0.000000
3/16/2010	2:07:49 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:07:49 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:07:49 PM	Tube furnace set to 0
3/16/2010	2:07:49 PM	Run finished at 2:07 PM
3/16/2010	2:07:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	2:07:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	2:07:54 PM	Recipe started at 2:07 PM
3/16/2010	2:07:54 PM	Helium valve closed
3/16/2010	2:07:54 PM	H2 valve closed
3/16/2010	2:07:54 PM	BCl3 valve closed
3/16/2010	2:07:54 PM	PH3 valve closed
3/16/2010	2:07:54 PM	SiCl4 pre valve closed
3/16/2010	2:07:54 PM	SiCl4 post valve closed
3/16/2010	2:07:54 PM	Main Vac valve closed
3/16/2010	2:07:54 PM	Bubbler valve closed
3/16/2010	2:07:54 PM	Bypass valve opened
3/16/2010	2:07:54 PM	Helium MFC set to  0.000000
3/16/2010	2:07:54 PM	H2 MFC set to  0.000000
3/16/2010	2:07:54 PM	BCl3 MFC set to  0.000000
3/16/2010	2:07:54 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:07:54 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:07:54 PM	Tube furnace set to 0
3/16/2010	2:08:16 PM	Helium valve closed
3/16/2010	2:08:16 PM	H2 valve closed
3/16/2010	2:08:16 PM	BCl3 valve closed
3/16/2010	2:08:16 PM	PH3 valve closed
3/16/2010	2:08:16 PM	SiCl4 pre valve closed
3/16/2010	2:08:16 PM	SiCl4 post valve closed
3/16/2010	2:08:16 PM	Bubbler valve closed
3/16/2010	2:08:16 PM	Main Vac valve opened
3/16/2010	2:08:16 PM	Bypass valve opened
3/16/2010	2:08:16 PM	Helium MFC set to  0.000000
3/16/2010	2:08:16 PM	H2 MFC set to  0.000000
3/16/2010	2:08:16 PM	BCl3 MFC set to  0.000000
3/16/2010	2:08:16 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:08:16 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:08:16 PM	Tube furnace set to 0
3/16/2010	2:08:16 PM	Run finished at 2:08 PM
3/16/2010	2:08:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	2:08:48 PM	Bypass valve closed
3/16/2010	2:08:49 PM	Main Vac valve closed
3/16/2010	2:09:04 PM	Bypass valve opened
3/16/2010	2:09:05 PM	Main Vac valve opened
3/16/2010	2:09:56 PM	Recipe started at 2:09 PM
3/16/2010	2:09:56 PM	Helium valve closed
3/16/2010	2:09:56 PM	BCl3 valve closed
3/16/2010	2:09:56 PM	PH3 valve closed
3/16/2010	2:09:56 PM	SiCl4 pre valve closed
3/16/2010	2:09:56 PM	SiCl4 post valve closed
3/16/2010	2:09:56 PM	Main Vac valve closed
3/16/2010	2:09:56 PM	Bypass valve closed
3/16/2010	2:09:56 PM	Bubbler valve closed
3/16/2010	2:09:56 PM	H2 valve opened
3/16/2010	2:09:56 PM	Helium MFC set to  0.000000
3/16/2010	2:09:56 PM	H2 MFC set to  500.000000
3/16/2010	2:09:56 PM	BCl3 MFC set to  0.000000
3/16/2010	2:09:56 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:09:56 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:09:56 PM	Tube furnace set to 0
3/16/2010	2:11:18 PM	Helium valve closed
3/16/2010	2:11:18 PM	BCl3 valve closed
3/16/2010	2:11:18 PM	PH3 valve closed
3/16/2010	2:11:18 PM	SiCl4 pre valve closed
3/16/2010	2:11:18 PM	SiCl4 post valve closed
3/16/2010	2:11:18 PM	Main Vac valve closed
3/16/2010	2:11:18 PM	Bypass valve closed
3/16/2010	2:11:18 PM	H2 valve opened
3/16/2010	2:11:18 PM	Bubbler valve opened
3/16/2010	2:11:18 PM	Helium MFC set to  0.000000
3/16/2010	2:11:18 PM	H2 MFC set to  500.000000
3/16/2010	2:11:18 PM	BCl3 MFC set to  0.000000
3/16/2010	2:11:18 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:11:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:11:18 PM	Tube furnace set to 0
3/16/2010	2:31:19 PM	Helium valve closed
3/16/2010	2:31:19 PM	PH3 valve closed
3/16/2010	2:31:19 PM	Main Vac valve closed
3/16/2010	2:31:19 PM	Bypass valve closed
3/16/2010	2:31:19 PM	H2 valve opened
3/16/2010	2:31:19 PM	BCl3 valve opened
3/16/2010	2:31:19 PM	SiCl4 pre valve opened
3/16/2010	2:31:19 PM	SiCl4 post valve opened
3/16/2010	2:31:19 PM	Bubbler valve opened
3/16/2010	2:31:19 PM	Helium MFC set to  0.000000
3/16/2010	2:31:19 PM	H2 MFC set to  500.000000
3/16/2010	2:31:19 PM	BCl3 MFC set to  35.000000
3/16/2010	2:31:19 PM	SiCl4 MFC set to  400.000000
3/16/2010	2:31:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:31:19 PM	Tube furnace set to 0
3/16/2010	2:51:19 PM	H2 valve closed
3/16/2010	2:51:19 PM	BCl3 valve closed
3/16/2010	2:51:19 PM	PH3 valve closed
3/16/2010	2:51:19 PM	SiCl4 pre valve closed
3/16/2010	2:51:19 PM	SiCl4 post valve closed
3/16/2010	2:51:19 PM	Main Vac valve closed
3/16/2010	2:51:19 PM	Bypass valve closed
3/16/2010	2:51:19 PM	Helium valve opened
3/16/2010	2:51:19 PM	Bubbler valve opened
3/16/2010	2:51:19 PM	Helium MFC set to  500.000000
3/16/2010	2:51:19 PM	H2 MFC set to  0.000000
3/16/2010	2:51:19 PM	BCl3 MFC set to  0.000000
3/16/2010	2:51:19 PM	SiCl4 MFC set to  0.000000
3/16/2010	2:51:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	2:51:19 PM	Tube furnace set to 0
3/16/2010	3:11:19 PM	Helium valve closed
3/16/2010	3:11:19 PM	H2 valve closed
3/16/2010	3:11:19 PM	BCl3 valve closed
3/16/2010	3:11:19 PM	PH3 valve closed
3/16/2010	3:11:19 PM	SiCl4 pre valve closed
3/16/2010	3:11:19 PM	SiCl4 post valve closed
3/16/2010	3:11:19 PM	Main Vac valve closed
3/16/2010	3:11:19 PM	Bypass valve closed
3/16/2010	3:11:19 PM	Bubbler valve closed
3/16/2010	3:11:19 PM	Helium MFC set to  0.000000
3/16/2010	3:11:19 PM	H2 MFC set to  0.000000
3/16/2010	3:11:19 PM	BCl3 MFC set to  0.000000
3/16/2010	3:11:19 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:11:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:11:19 PM	Tube furnace set to 0
3/16/2010	3:11:20 PM	Run finished at 3:11 PM
3/16/2010	3:15:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	3:15:02 PM	Recipe started at 3:15 PM
3/16/2010	3:15:02 PM	Helium valve closed
3/16/2010	3:15:02 PM	H2 valve closed
3/16/2010	3:15:02 PM	BCl3 valve closed
3/16/2010	3:15:02 PM	PH3 valve closed
3/16/2010	3:15:02 PM	SiCl4 pre valve closed
3/16/2010	3:15:02 PM	SiCl4 post valve closed
3/16/2010	3:15:02 PM	Main Vac valve closed
3/16/2010	3:15:02 PM	Bubbler valve closed
3/16/2010	3:15:02 PM	Bypass valve opened
3/16/2010	3:15:02 PM	Helium MFC set to  0.000000
3/16/2010	3:15:02 PM	H2 MFC set to  0.000000
3/16/2010	3:15:02 PM	BCl3 MFC set to  0.000000
3/16/2010	3:15:02 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:15:02 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:15:02 PM	Tube furnace set to 0
3/16/2010	3:15:33 PM	Helium valve closed
3/16/2010	3:15:33 PM	H2 valve closed
3/16/2010	3:15:33 PM	BCl3 valve closed
3/16/2010	3:15:33 PM	PH3 valve closed
3/16/2010	3:15:33 PM	SiCl4 pre valve closed
3/16/2010	3:15:33 PM	SiCl4 post valve closed
3/16/2010	3:15:33 PM	Bubbler valve closed
3/16/2010	3:15:33 PM	Main Vac valve opened
3/16/2010	3:15:33 PM	Bypass valve opened
3/16/2010	3:15:33 PM	Helium MFC set to  0.000000
3/16/2010	3:15:33 PM	H2 MFC set to  0.000000
3/16/2010	3:15:33 PM	BCl3 MFC set to  0.000000
3/16/2010	3:15:33 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:15:33 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:15:33 PM	Tube furnace set to 0
3/16/2010	3:15:33 PM	Run finished at 3:15 PM
3/16/2010	3:15:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	3:15:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	3:15:59 PM	Recipe started at 3:15 PM
3/16/2010	3:15:59 PM	H2 valve closed
3/16/2010	3:15:59 PM	BCl3 valve closed
3/16/2010	3:15:59 PM	PH3 valve closed
3/16/2010	3:15:59 PM	SiCl4 pre valve closed
3/16/2010	3:15:59 PM	SiCl4 post valve closed
3/16/2010	3:15:59 PM	Main Vac valve closed
3/16/2010	3:15:59 PM	Bypass valve closed
3/16/2010	3:15:59 PM	Bubbler valve closed
3/16/2010	3:15:59 PM	Helium valve opened
3/16/2010	3:15:59 PM	Helium MFC set to  500.000000
3/16/2010	3:15:59 PM	H2 MFC set to  0.000000
3/16/2010	3:15:59 PM	BCl3 MFC set to  0.000000
3/16/2010	3:15:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:15:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:15:59 PM	Tube furnace set to 0
3/16/2010	3:17:18 PM	Helium valve closed
3/16/2010	3:17:18 PM	H2 valve closed
3/16/2010	3:17:18 PM	BCl3 valve closed
3/16/2010	3:17:18 PM	PH3 valve closed
3/16/2010	3:17:18 PM	SiCl4 pre valve closed
3/16/2010	3:17:18 PM	SiCl4 post valve closed
3/16/2010	3:17:18 PM	Main Vac valve closed
3/16/2010	3:17:18 PM	Bypass valve closed
3/16/2010	3:17:18 PM	Bubbler valve closed
3/16/2010	3:17:18 PM	Helium MFC set to  0.000000
3/16/2010	3:17:18 PM	H2 MFC set to  0.000000
3/16/2010	3:17:18 PM	BCl3 MFC set to  0.000000
3/16/2010	3:17:18 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:17:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:17:18 PM	Tube furnace set to 0
3/16/2010	3:17:18 PM	Run finished at 3:17 PM
3/16/2010	3:17:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	3:17:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	3:17:22 PM	Recipe started at 3:17 PM
3/16/2010	3:17:22 PM	Helium valve closed
3/16/2010	3:17:22 PM	H2 valve closed
3/16/2010	3:17:22 PM	BCl3 valve closed
3/16/2010	3:17:22 PM	PH3 valve closed
3/16/2010	3:17:22 PM	SiCl4 pre valve closed
3/16/2010	3:17:22 PM	SiCl4 post valve closed
3/16/2010	3:17:22 PM	Main Vac valve closed
3/16/2010	3:17:22 PM	Bubbler valve closed
3/16/2010	3:17:22 PM	Bypass valve opened
3/16/2010	3:17:22 PM	Helium MFC set to  0.000000
3/16/2010	3:17:22 PM	H2 MFC set to  0.000000
3/16/2010	3:17:22 PM	BCl3 MFC set to  0.000000
3/16/2010	3:17:22 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:17:22 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:17:22 PM	Tube furnace set to 0
3/16/2010	3:17:44 PM	Helium valve closed
3/16/2010	3:17:44 PM	H2 valve closed
3/16/2010	3:17:44 PM	BCl3 valve closed
3/16/2010	3:17:44 PM	PH3 valve closed
3/16/2010	3:17:44 PM	SiCl4 pre valve closed
3/16/2010	3:17:44 PM	SiCl4 post valve closed
3/16/2010	3:17:44 PM	Bubbler valve closed
3/16/2010	3:17:44 PM	Main Vac valve opened
3/16/2010	3:17:44 PM	Bypass valve opened
3/16/2010	3:17:44 PM	Helium MFC set to  0.000000
3/16/2010	3:17:44 PM	H2 MFC set to  0.000000
3/16/2010	3:17:44 PM	BCl3 MFC set to  0.000000
3/16/2010	3:17:44 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:17:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:17:44 PM	Tube furnace set to 0
3/16/2010	3:17:44 PM	Run finished at 3:17 PM
3/16/2010	3:17:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	3:18:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	3:18:00 PM	Recipe started at 3:18 PM
3/16/2010	3:18:00 PM	H2 valve closed
3/16/2010	3:18:00 PM	BCl3 valve closed
3/16/2010	3:18:00 PM	PH3 valve closed
3/16/2010	3:18:00 PM	SiCl4 pre valve closed
3/16/2010	3:18:00 PM	SiCl4 post valve closed
3/16/2010	3:18:00 PM	Main Vac valve closed
3/16/2010	3:18:00 PM	Bypass valve closed
3/16/2010	3:18:00 PM	Bubbler valve closed
3/16/2010	3:18:00 PM	Helium valve opened
3/16/2010	3:18:00 PM	Helium MFC set to  500.000000
3/16/2010	3:18:00 PM	H2 MFC set to  0.000000
3/16/2010	3:18:00 PM	BCl3 MFC set to  0.000000
3/16/2010	3:18:00 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:18:00 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:18:00 PM	Tube furnace set to 0
3/16/2010	3:19:19 PM	Helium valve closed
3/16/2010	3:19:19 PM	H2 valve closed
3/16/2010	3:19:19 PM	BCl3 valve closed
3/16/2010	3:19:19 PM	PH3 valve closed
3/16/2010	3:19:19 PM	SiCl4 pre valve closed
3/16/2010	3:19:19 PM	SiCl4 post valve closed
3/16/2010	3:19:19 PM	Main Vac valve closed
3/16/2010	3:19:19 PM	Bypass valve closed
3/16/2010	3:19:19 PM	Bubbler valve closed
3/16/2010	3:19:19 PM	Helium MFC set to  0.000000
3/16/2010	3:19:19 PM	H2 MFC set to  0.000000
3/16/2010	3:19:19 PM	BCl3 MFC set to  0.000000
3/16/2010	3:19:19 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:19:19 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:19:19 PM	Tube furnace set to 0
3/16/2010	3:19:19 PM	Run finished at 3:19 PM
3/16/2010	3:19:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	3:19:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	3:19:22 PM	Recipe started at 3:19 PM
3/16/2010	3:19:22 PM	Helium valve closed
3/16/2010	3:19:22 PM	H2 valve closed
3/16/2010	3:19:22 PM	BCl3 valve closed
3/16/2010	3:19:22 PM	PH3 valve closed
3/16/2010	3:19:22 PM	SiCl4 pre valve closed
3/16/2010	3:19:22 PM	SiCl4 post valve closed
3/16/2010	3:19:22 PM	Main Vac valve closed
3/16/2010	3:19:22 PM	Bubbler valve closed
3/16/2010	3:19:22 PM	Bypass valve opened
3/16/2010	3:19:22 PM	Helium MFC set to  0.000000
3/16/2010	3:19:22 PM	H2 MFC set to  0.000000
3/16/2010	3:19:22 PM	BCl3 MFC set to  0.000000
3/16/2010	3:19:22 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:19:22 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:19:22 PM	Tube furnace set to 0
3/16/2010	3:19:44 PM	Helium valve closed
3/16/2010	3:19:44 PM	H2 valve closed
3/16/2010	3:19:44 PM	BCl3 valve closed
3/16/2010	3:19:44 PM	PH3 valve closed
3/16/2010	3:19:44 PM	SiCl4 pre valve closed
3/16/2010	3:19:44 PM	SiCl4 post valve closed
3/16/2010	3:19:44 PM	Bubbler valve closed
3/16/2010	3:19:44 PM	Main Vac valve opened
3/16/2010	3:19:44 PM	Bypass valve opened
3/16/2010	3:19:44 PM	Helium MFC set to  0.000000
3/16/2010	3:19:44 PM	H2 MFC set to  0.000000
3/16/2010	3:19:44 PM	BCl3 MFC set to  0.000000
3/16/2010	3:19:44 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:19:44 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:19:44 PM	Tube furnace set to 0
3/16/2010	3:19:44 PM	Run finished at 3:19 PM
3/16/2010	3:19:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	3:24:23 PM	Bypass valve closed
3/16/2010	3:24:23 PM	Main Vac valve closed
3/16/2010	3:24:44 PM	Bypass valve opened
3/16/2010	3:24:45 PM	Main Vac valve opened
3/16/2010	3:25:42 PM	Recipe started at 3:25 PM
3/16/2010	3:25:42 PM	Helium valve closed
3/16/2010	3:25:42 PM	BCl3 valve closed
3/16/2010	3:25:42 PM	PH3 valve closed
3/16/2010	3:25:42 PM	SiCl4 pre valve closed
3/16/2010	3:25:42 PM	SiCl4 post valve closed
3/16/2010	3:25:42 PM	Main Vac valve closed
3/16/2010	3:25:42 PM	Bypass valve closed
3/16/2010	3:25:42 PM	Bubbler valve closed
3/16/2010	3:25:42 PM	H2 valve opened
3/16/2010	3:25:42 PM	Helium MFC set to  0.000000
3/16/2010	3:25:42 PM	H2 MFC set to  500.000000
3/16/2010	3:25:42 PM	BCl3 MFC set to  0.000000
3/16/2010	3:25:42 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:25:42 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:25:42 PM	Tube furnace set to 0
3/16/2010	3:27:04 PM	Helium valve closed
3/16/2010	3:27:04 PM	BCl3 valve closed
3/16/2010	3:27:04 PM	PH3 valve closed
3/16/2010	3:27:04 PM	SiCl4 pre valve closed
3/16/2010	3:27:04 PM	SiCl4 post valve closed
3/16/2010	3:27:04 PM	Main Vac valve closed
3/16/2010	3:27:04 PM	Bypass valve closed
3/16/2010	3:27:04 PM	H2 valve opened
3/16/2010	3:27:04 PM	Bubbler valve opened
3/16/2010	3:27:04 PM	Helium MFC set to  0.000000
3/16/2010	3:27:04 PM	H2 MFC set to  500.000000
3/16/2010	3:27:04 PM	BCl3 MFC set to  0.000000
3/16/2010	3:27:04 PM	SiCl4 MFC set to  0.000000
3/16/2010	3:27:04 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:27:04 PM	Tube furnace set to 0
3/16/2010	3:47:04 PM	Helium valve closed
3/16/2010	3:47:04 PM	PH3 valve closed
3/16/2010	3:47:04 PM	Main Vac valve closed
3/16/2010	3:47:04 PM	Bypass valve closed
3/16/2010	3:47:04 PM	H2 valve opened
3/16/2010	3:47:04 PM	BCl3 valve opened
3/16/2010	3:47:04 PM	SiCl4 pre valve opened
3/16/2010	3:47:04 PM	SiCl4 post valve opened
3/16/2010	3:47:04 PM	Bubbler valve opened
3/16/2010	3:47:04 PM	Helium MFC set to  0.000000
3/16/2010	3:47:04 PM	H2 MFC set to  500.000000
3/16/2010	3:47:04 PM	BCl3 MFC set to  35.000000
3/16/2010	3:47:04 PM	SiCl4 MFC set to  400.000000
3/16/2010	3:47:04 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	3:47:04 PM	Tube furnace set to 0
3/16/2010	4:07:05 PM	H2 valve closed
3/16/2010	4:07:05 PM	BCl3 valve closed
3/16/2010	4:07:05 PM	PH3 valve closed
3/16/2010	4:07:05 PM	SiCl4 pre valve closed
3/16/2010	4:07:05 PM	SiCl4 post valve closed
3/16/2010	4:07:05 PM	Main Vac valve closed
3/16/2010	4:07:05 PM	Bypass valve closed
3/16/2010	4:07:05 PM	Helium valve opened
3/16/2010	4:07:05 PM	Bubbler valve opened
3/16/2010	4:07:05 PM	Helium MFC set to  500.000000
3/16/2010	4:07:05 PM	H2 MFC set to  0.000000
3/16/2010	4:07:05 PM	BCl3 MFC set to  0.000000
3/16/2010	4:07:05 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:07:05 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:07:05 PM	Tube furnace set to 0
3/16/2010	4:27:05 PM	Helium valve closed
3/16/2010	4:27:05 PM	H2 valve closed
3/16/2010	4:27:05 PM	BCl3 valve closed
3/16/2010	4:27:05 PM	PH3 valve closed
3/16/2010	4:27:05 PM	SiCl4 pre valve closed
3/16/2010	4:27:05 PM	SiCl4 post valve closed
3/16/2010	4:27:05 PM	Main Vac valve closed
3/16/2010	4:27:05 PM	Bypass valve closed
3/16/2010	4:27:05 PM	Bubbler valve closed
3/16/2010	4:27:05 PM	Helium MFC set to  0.000000
3/16/2010	4:27:05 PM	H2 MFC set to  0.000000
3/16/2010	4:27:05 PM	BCl3 MFC set to  0.000000
3/16/2010	4:27:05 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:27:05 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:27:05 PM	Tube furnace set to 0
3/16/2010	4:27:05 PM	Run finished at 4:27 PM
3/16/2010	4:31:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:31:00 PM	Recipe started at 4:31 PM
3/16/2010	4:31:00 PM	Helium valve closed
3/16/2010	4:31:00 PM	H2 valve closed
3/16/2010	4:31:00 PM	BCl3 valve closed
3/16/2010	4:31:00 PM	PH3 valve closed
3/16/2010	4:31:00 PM	SiCl4 pre valve closed
3/16/2010	4:31:00 PM	SiCl4 post valve closed
3/16/2010	4:31:00 PM	Main Vac valve closed
3/16/2010	4:31:00 PM	Bubbler valve closed
3/16/2010	4:31:00 PM	Bypass valve opened
3/16/2010	4:31:00 PM	Helium MFC set to  0.000000
3/16/2010	4:31:00 PM	H2 MFC set to  0.000000
3/16/2010	4:31:00 PM	BCl3 MFC set to  0.000000
3/16/2010	4:31:00 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:31:00 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:31:00 PM	Tube furnace set to 0
3/16/2010	4:31:31 PM	Helium valve closed
3/16/2010	4:31:31 PM	H2 valve closed
3/16/2010	4:31:31 PM	BCl3 valve closed
3/16/2010	4:31:31 PM	PH3 valve closed
3/16/2010	4:31:31 PM	SiCl4 pre valve closed
3/16/2010	4:31:31 PM	SiCl4 post valve closed
3/16/2010	4:31:31 PM	Bubbler valve closed
3/16/2010	4:31:31 PM	Main Vac valve opened
3/16/2010	4:31:31 PM	Bypass valve opened
3/16/2010	4:31:31 PM	Helium MFC set to  0.000000
3/16/2010	4:31:31 PM	H2 MFC set to  0.000000
3/16/2010	4:31:31 PM	BCl3 MFC set to  0.000000
3/16/2010	4:31:31 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:31:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:31:31 PM	Tube furnace set to 0
3/16/2010	4:31:31 PM	Run finished at 4:31 PM
3/16/2010	4:31:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:31:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:31:40 PM	Recipe started at 4:31 PM
3/16/2010	4:31:40 PM	H2 valve closed
3/16/2010	4:31:40 PM	BCl3 valve closed
3/16/2010	4:31:40 PM	PH3 valve closed
3/16/2010	4:31:40 PM	SiCl4 pre valve closed
3/16/2010	4:31:40 PM	SiCl4 post valve closed
3/16/2010	4:31:40 PM	Main Vac valve closed
3/16/2010	4:31:40 PM	Bypass valve closed
3/16/2010	4:31:40 PM	Bubbler valve closed
3/16/2010	4:31:40 PM	Helium valve opened
3/16/2010	4:31:40 PM	Helium MFC set to  500.000000
3/16/2010	4:31:40 PM	H2 MFC set to  0.000000
3/16/2010	4:31:40 PM	BCl3 MFC set to  0.000000
3/16/2010	4:31:40 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:31:40 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:31:40 PM	Tube furnace set to 0
3/16/2010	4:32:58 PM	Helium valve closed
3/16/2010	4:32:58 PM	H2 valve closed
3/16/2010	4:32:58 PM	BCl3 valve closed
3/16/2010	4:32:58 PM	PH3 valve closed
3/16/2010	4:32:58 PM	SiCl4 pre valve closed
3/16/2010	4:32:58 PM	SiCl4 post valve closed
3/16/2010	4:32:58 PM	Main Vac valve closed
3/16/2010	4:32:58 PM	Bypass valve closed
3/16/2010	4:32:58 PM	Bubbler valve closed
3/16/2010	4:32:58 PM	Helium MFC set to  0.000000
3/16/2010	4:32:58 PM	H2 MFC set to  0.000000
3/16/2010	4:32:58 PM	BCl3 MFC set to  0.000000
3/16/2010	4:32:58 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:32:58 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:32:58 PM	Tube furnace set to 0
3/16/2010	4:32:59 PM	Run finished at 4:32 PM
3/16/2010	4:32:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:33:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:33:02 PM	Recipe started at 4:33 PM
3/16/2010	4:33:02 PM	Helium valve closed
3/16/2010	4:33:02 PM	H2 valve closed
3/16/2010	4:33:02 PM	BCl3 valve closed
3/16/2010	4:33:02 PM	PH3 valve closed
3/16/2010	4:33:02 PM	SiCl4 pre valve closed
3/16/2010	4:33:02 PM	SiCl4 post valve closed
3/16/2010	4:33:02 PM	Main Vac valve closed
3/16/2010	4:33:02 PM	Bubbler valve closed
3/16/2010	4:33:02 PM	Bypass valve opened
3/16/2010	4:33:02 PM	Helium MFC set to  0.000000
3/16/2010	4:33:02 PM	H2 MFC set to  0.000000
3/16/2010	4:33:02 PM	BCl3 MFC set to  0.000000
3/16/2010	4:33:02 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:33:02 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:33:02 PM	Tube furnace set to 0
3/16/2010	4:33:23 PM	Helium valve closed
3/16/2010	4:33:23 PM	H2 valve closed
3/16/2010	4:33:23 PM	BCl3 valve closed
3/16/2010	4:33:23 PM	PH3 valve closed
3/16/2010	4:33:23 PM	SiCl4 pre valve closed
3/16/2010	4:33:23 PM	SiCl4 post valve closed
3/16/2010	4:33:23 PM	Bubbler valve closed
3/16/2010	4:33:23 PM	Main Vac valve opened
3/16/2010	4:33:23 PM	Bypass valve opened
3/16/2010	4:33:23 PM	Helium MFC set to  0.000000
3/16/2010	4:33:23 PM	H2 MFC set to  0.000000
3/16/2010	4:33:23 PM	BCl3 MFC set to  0.000000
3/16/2010	4:33:23 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:33:23 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:33:23 PM	Tube furnace set to 0
3/16/2010	4:33:24 PM	Run finished at 4:33 PM
3/16/2010	4:33:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:33:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:33:31 PM	Recipe started at 4:33 PM
3/16/2010	4:33:31 PM	H2 valve closed
3/16/2010	4:33:31 PM	BCl3 valve closed
3/16/2010	4:33:31 PM	PH3 valve closed
3/16/2010	4:33:31 PM	SiCl4 pre valve closed
3/16/2010	4:33:31 PM	SiCl4 post valve closed
3/16/2010	4:33:31 PM	Main Vac valve closed
3/16/2010	4:33:31 PM	Bypass valve closed
3/16/2010	4:33:31 PM	Bubbler valve closed
3/16/2010	4:33:31 PM	Helium valve opened
3/16/2010	4:33:31 PM	Helium MFC set to  500.000000
3/16/2010	4:33:31 PM	H2 MFC set to  0.000000
3/16/2010	4:33:31 PM	BCl3 MFC set to  0.000000
3/16/2010	4:33:31 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:33:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:33:31 PM	Tube furnace set to 0
3/16/2010	4:34:50 PM	Helium valve closed
3/16/2010	4:34:50 PM	H2 valve closed
3/16/2010	4:34:50 PM	BCl3 valve closed
3/16/2010	4:34:50 PM	PH3 valve closed
3/16/2010	4:34:50 PM	SiCl4 pre valve closed
3/16/2010	4:34:50 PM	SiCl4 post valve closed
3/16/2010	4:34:50 PM	Main Vac valve closed
3/16/2010	4:34:50 PM	Bypass valve closed
3/16/2010	4:34:50 PM	Bubbler valve closed
3/16/2010	4:34:50 PM	Helium MFC set to  0.000000
3/16/2010	4:34:50 PM	H2 MFC set to  0.000000
3/16/2010	4:34:50 PM	BCl3 MFC set to  0.000000
3/16/2010	4:34:50 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:34:50 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:34:50 PM	Tube furnace set to 0
3/16/2010	4:34:50 PM	Run finished at 4:34 PM
3/16/2010	4:34:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:34:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:34:53 PM	Recipe started at 4:34 PM
3/16/2010	4:34:53 PM	Helium valve closed
3/16/2010	4:34:53 PM	H2 valve closed
3/16/2010	4:34:53 PM	BCl3 valve closed
3/16/2010	4:34:53 PM	PH3 valve closed
3/16/2010	4:34:53 PM	SiCl4 pre valve closed
3/16/2010	4:34:53 PM	SiCl4 post valve closed
3/16/2010	4:34:53 PM	Main Vac valve closed
3/16/2010	4:34:53 PM	Bubbler valve closed
3/16/2010	4:34:53 PM	Bypass valve opened
3/16/2010	4:34:53 PM	Helium MFC set to  0.000000
3/16/2010	4:34:53 PM	H2 MFC set to  0.000000
3/16/2010	4:34:53 PM	BCl3 MFC set to  0.000000
3/16/2010	4:34:53 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:34:53 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:34:53 PM	Tube furnace set to 0
3/16/2010	4:35:15 PM	Helium valve closed
3/16/2010	4:35:15 PM	H2 valve closed
3/16/2010	4:35:15 PM	BCl3 valve closed
3/16/2010	4:35:15 PM	PH3 valve closed
3/16/2010	4:35:15 PM	SiCl4 pre valve closed
3/16/2010	4:35:15 PM	SiCl4 post valve closed
3/16/2010	4:35:15 PM	Bubbler valve closed
3/16/2010	4:35:15 PM	Main Vac valve opened
3/16/2010	4:35:15 PM	Bypass valve opened
3/16/2010	4:35:15 PM	Helium MFC set to  0.000000
3/16/2010	4:35:15 PM	H2 MFC set to  0.000000
3/16/2010	4:35:15 PM	BCl3 MFC set to  0.000000
3/16/2010	4:35:15 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:35:15 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:35:15 PM	Tube furnace set to 0
3/16/2010	4:35:16 PM	Run finished at 4:35 PM
3/16/2010	4:35:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:36:54 PM	Bypass valve closed
3/16/2010	4:36:55 PM	Main Vac valve closed
3/16/2010	4:37:02 PM	Bypass valve opened
3/16/2010	4:37:02 PM	Main Vac valve opened
3/16/2010	4:38:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:38:12 PM	Recipe started at 4:38 PM
3/16/2010	4:38:12 PM	H2 valve closed
3/16/2010	4:38:12 PM	BCl3 valve closed
3/16/2010	4:38:12 PM	PH3 valve closed
3/16/2010	4:38:12 PM	SiCl4 pre valve closed
3/16/2010	4:38:12 PM	SiCl4 post valve closed
3/16/2010	4:38:12 PM	Main Vac valve closed
3/16/2010	4:38:12 PM	Bypass valve closed
3/16/2010	4:38:12 PM	Bubbler valve closed
3/16/2010	4:38:12 PM	Helium valve opened
3/16/2010	4:38:12 PM	Helium MFC set to  500.000000
3/16/2010	4:38:12 PM	H2 MFC set to  0.000000
3/16/2010	4:38:12 PM	BCl3 MFC set to  0.000000
3/16/2010	4:38:12 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:38:12 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:38:12 PM	Tube furnace set to 0
3/16/2010	4:39:31 PM	Helium valve closed
3/16/2010	4:39:31 PM	H2 valve closed
3/16/2010	4:39:31 PM	BCl3 valve closed
3/16/2010	4:39:31 PM	PH3 valve closed
3/16/2010	4:39:31 PM	SiCl4 pre valve closed
3/16/2010	4:39:31 PM	SiCl4 post valve closed
3/16/2010	4:39:31 PM	Main Vac valve closed
3/16/2010	4:39:31 PM	Bypass valve closed
3/16/2010	4:39:31 PM	Bubbler valve closed
3/16/2010	4:39:31 PM	Helium MFC set to  0.000000
3/16/2010	4:39:31 PM	H2 MFC set to  0.000000
3/16/2010	4:39:31 PM	BCl3 MFC set to  0.000000
3/16/2010	4:39:31 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:39:31 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:39:31 PM	Tube furnace set to 0
3/16/2010	4:39:31 PM	Run finished at 4:39 PM
3/16/2010	4:39:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:52:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:52:41 PM	Recipe started at 4:52 PM
3/16/2010	4:52:41 PM	Helium valve closed
3/16/2010	4:52:41 PM	H2 valve closed
3/16/2010	4:52:41 PM	BCl3 valve closed
3/16/2010	4:52:41 PM	PH3 valve closed
3/16/2010	4:52:41 PM	SiCl4 pre valve closed
3/16/2010	4:52:41 PM	SiCl4 post valve closed
3/16/2010	4:52:41 PM	Main Vac valve closed
3/16/2010	4:52:41 PM	Bubbler valve closed
3/16/2010	4:52:41 PM	Bypass valve opened
3/16/2010	4:52:41 PM	Helium MFC set to  0.000000
3/16/2010	4:52:41 PM	H2 MFC set to  0.000000
3/16/2010	4:52:41 PM	BCl3 MFC set to  0.000000
3/16/2010	4:52:41 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:52:41 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:52:41 PM	Tube furnace set to 0
3/16/2010	4:53:12 PM	Helium valve closed
3/16/2010	4:53:12 PM	H2 valve closed
3/16/2010	4:53:12 PM	BCl3 valve closed
3/16/2010	4:53:12 PM	PH3 valve closed
3/16/2010	4:53:12 PM	SiCl4 pre valve closed
3/16/2010	4:53:12 PM	SiCl4 post valve closed
3/16/2010	4:53:12 PM	Bubbler valve closed
3/16/2010	4:53:12 PM	Main Vac valve opened
3/16/2010	4:53:12 PM	Bypass valve opened
3/16/2010	4:53:12 PM	Helium MFC set to  0.000000
3/16/2010	4:53:12 PM	H2 MFC set to  0.000000
3/16/2010	4:53:12 PM	BCl3 MFC set to  0.000000
3/16/2010	4:53:12 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:53:12 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:53:12 PM	Tube furnace set to 0
3/16/2010	4:53:12 PM	Run finished at 4:53 PM
3/16/2010	4:53:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	4:54:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	4:54:10 PM	Recipe started at 4:54 PM
3/16/2010	4:54:10 PM	H2 valve closed
3/16/2010	4:54:10 PM	BCl3 valve closed
3/16/2010	4:54:10 PM	PH3 valve closed
3/16/2010	4:54:10 PM	SiCl4 pre valve closed
3/16/2010	4:54:10 PM	SiCl4 post valve closed
3/16/2010	4:54:10 PM	Main Vac valve closed
3/16/2010	4:54:10 PM	Bypass valve closed
3/16/2010	4:54:10 PM	Bubbler valve closed
3/16/2010	4:54:10 PM	Helium valve opened
3/16/2010	4:54:10 PM	Helium MFC set to  500.000000
3/16/2010	4:54:10 PM	H2 MFC set to  0.000000
3/16/2010	4:54:10 PM	BCl3 MFC set to  0.000000
3/16/2010	4:54:10 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:54:10 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:54:10 PM	Tube furnace set to 0
3/16/2010	4:55:30 PM	Helium valve closed
3/16/2010	4:55:30 PM	H2 valve closed
3/16/2010	4:55:30 PM	BCl3 valve closed
3/16/2010	4:55:30 PM	PH3 valve closed
3/16/2010	4:55:30 PM	SiCl4 pre valve closed
3/16/2010	4:55:30 PM	SiCl4 post valve closed
3/16/2010	4:55:30 PM	Main Vac valve closed
3/16/2010	4:55:30 PM	Bypass valve closed
3/16/2010	4:55:30 PM	Bubbler valve closed
3/16/2010	4:55:30 PM	Helium MFC set to  0.000000
3/16/2010	4:55:30 PM	H2 MFC set to  0.000000
3/16/2010	4:55:30 PM	BCl3 MFC set to  0.000000
3/16/2010	4:55:30 PM	SiCl4 MFC set to  0.000000
3/16/2010	4:55:30 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	4:55:30 PM	Tube furnace set to 0
3/16/2010	4:55:30 PM	Run finished at 4:55 PM
3/16/2010	4:55:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	5:00:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	5:00:07 PM	Recipe started at 5:00 PM
3/16/2010	5:00:07 PM	Helium valve closed
3/16/2010	5:00:07 PM	H2 valve closed
3/16/2010	5:00:07 PM	BCl3 valve closed
3/16/2010	5:00:07 PM	PH3 valve closed
3/16/2010	5:00:07 PM	SiCl4 pre valve closed
3/16/2010	5:00:07 PM	SiCl4 post valve closed
3/16/2010	5:00:07 PM	Main Vac valve closed
3/16/2010	5:00:07 PM	Bubbler valve closed
3/16/2010	5:00:07 PM	Bypass valve opened
3/16/2010	5:00:07 PM	Helium MFC set to  0.000000
3/16/2010	5:00:07 PM	H2 MFC set to  0.000000
3/16/2010	5:00:07 PM	BCl3 MFC set to  0.000000
3/16/2010	5:00:07 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:00:07 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:00:07 PM	Tube furnace set to 0
3/16/2010	5:00:38 PM	Helium valve closed
3/16/2010	5:00:38 PM	H2 valve closed
3/16/2010	5:00:38 PM	BCl3 valve closed
3/16/2010	5:00:38 PM	PH3 valve closed
3/16/2010	5:00:38 PM	SiCl4 pre valve closed
3/16/2010	5:00:38 PM	SiCl4 post valve closed
3/16/2010	5:00:38 PM	Bubbler valve closed
3/16/2010	5:00:38 PM	Main Vac valve opened
3/16/2010	5:00:38 PM	Bypass valve opened
3/16/2010	5:00:38 PM	Helium MFC set to  0.000000
3/16/2010	5:00:38 PM	H2 MFC set to  0.000000
3/16/2010	5:00:38 PM	BCl3 MFC set to  0.000000
3/16/2010	5:00:38 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:00:38 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:00:38 PM	Tube furnace set to 0
3/16/2010	5:00:38 PM	Run finished at 5:00 PM
3/16/2010	5:00:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	5:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/16/2010	5:01:59 PM	Recipe started at 5:01 PM
3/16/2010	5:01:59 PM	H2 valve closed
3/16/2010	5:01:59 PM	BCl3 valve closed
3/16/2010	5:01:59 PM	PH3 valve closed
3/16/2010	5:01:59 PM	SiCl4 pre valve closed
3/16/2010	5:01:59 PM	SiCl4 post valve closed
3/16/2010	5:01:59 PM	Main Vac valve closed
3/16/2010	5:01:59 PM	Bypass valve closed
3/16/2010	5:01:59 PM	Bubbler valve closed
3/16/2010	5:01:59 PM	Helium valve opened
3/16/2010	5:01:59 PM	Helium MFC set to  500.000000
3/16/2010	5:01:59 PM	H2 MFC set to  0.000000
3/16/2010	5:01:59 PM	BCl3 MFC set to  0.000000
3/16/2010	5:01:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:01:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:01:59 PM	Tube furnace set to 0
3/16/2010	5:03:21 PM	Helium valve closed
3/16/2010	5:03:21 PM	H2 valve closed
3/16/2010	5:03:21 PM	BCl3 valve closed
3/16/2010	5:03:21 PM	PH3 valve closed
3/16/2010	5:03:21 PM	SiCl4 pre valve closed
3/16/2010	5:03:21 PM	SiCl4 post valve closed
3/16/2010	5:03:21 PM	Main Vac valve closed
3/16/2010	5:03:21 PM	Bypass valve closed
3/16/2010	5:03:21 PM	Bubbler valve closed
3/16/2010	5:03:21 PM	Helium MFC set to  0.000000
3/16/2010	5:03:21 PM	H2 MFC set to  0.000000
3/16/2010	5:03:21 PM	BCl3 MFC set to  0.000000
3/16/2010	5:03:21 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:03:21 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:03:21 PM	Tube furnace set to 0
3/16/2010	5:03:37 PM	Helium valve closed
3/16/2010	5:03:37 PM	H2 valve closed
3/16/2010	5:03:37 PM	BCl3 valve closed
3/16/2010	5:03:37 PM	PH3 valve closed
3/16/2010	5:03:37 PM	SiCl4 pre valve closed
3/16/2010	5:03:37 PM	SiCl4 post valve closed
3/16/2010	5:03:37 PM	Main Vac valve closed
3/16/2010	5:03:37 PM	Bubbler valve closed
3/16/2010	5:03:37 PM	Bypass valve opened
3/16/2010	5:03:37 PM	Helium MFC set to  0.000000
3/16/2010	5:03:37 PM	H2 MFC set to  0.000000
3/16/2010	5:03:37 PM	BCl3 MFC set to  0.000000
3/16/2010	5:03:37 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:03:37 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:03:37 PM	Tube furnace set to 0
3/16/2010	5:03:59 PM	Helium valve closed
3/16/2010	5:03:59 PM	H2 valve closed
3/16/2010	5:03:59 PM	BCl3 valve closed
3/16/2010	5:03:59 PM	PH3 valve closed
3/16/2010	5:03:59 PM	SiCl4 pre valve closed
3/16/2010	5:03:59 PM	SiCl4 post valve closed
3/16/2010	5:03:59 PM	Bubbler valve closed
3/16/2010	5:03:59 PM	Main Vac valve opened
3/16/2010	5:03:59 PM	Bypass valve opened
3/16/2010	5:03:59 PM	Helium MFC set to  0.000000
3/16/2010	5:03:59 PM	H2 MFC set to  0.000000
3/16/2010	5:03:59 PM	BCl3 MFC set to  0.000000
3/16/2010	5:03:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:03:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:03:59 PM	Tube furnace set to 0
3/16/2010	5:08:59 PM	H2 valve closed
3/16/2010	5:08:59 PM	BCl3 valve closed
3/16/2010	5:08:59 PM	PH3 valve closed
3/16/2010	5:08:59 PM	SiCl4 pre valve closed
3/16/2010	5:08:59 PM	SiCl4 post valve closed
3/16/2010	5:08:59 PM	Main Vac valve closed
3/16/2010	5:08:59 PM	Bypass valve closed
3/16/2010	5:08:59 PM	Bubbler valve closed
3/16/2010	5:08:59 PM	Helium valve opened
3/16/2010	5:08:59 PM	Helium MFC set to  500.000000
3/16/2010	5:08:59 PM	H2 MFC set to  0.000000
3/16/2010	5:08:59 PM	BCl3 MFC set to  0.000000
3/16/2010	5:08:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:08:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:08:59 PM	Tube furnace set to 0
3/16/2010	5:10:21 PM	Helium valve closed
3/16/2010	5:10:21 PM	H2 valve closed
3/16/2010	5:10:21 PM	BCl3 valve closed
3/16/2010	5:10:21 PM	PH3 valve closed
3/16/2010	5:10:21 PM	SiCl4 pre valve closed
3/16/2010	5:10:21 PM	SiCl4 post valve closed
3/16/2010	5:10:21 PM	Main Vac valve closed
3/16/2010	5:10:21 PM	Bypass valve closed
3/16/2010	5:10:21 PM	Bubbler valve closed
3/16/2010	5:10:21 PM	Helium MFC set to  0.000000
3/16/2010	5:10:21 PM	H2 MFC set to  0.000000
3/16/2010	5:10:21 PM	BCl3 MFC set to  0.000000
3/16/2010	5:10:21 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:10:21 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:10:21 PM	Tube furnace set to 0
3/16/2010	5:10:37 PM	Helium valve closed
3/16/2010	5:10:37 PM	H2 valve closed
3/16/2010	5:10:37 PM	BCl3 valve closed
3/16/2010	5:10:37 PM	PH3 valve closed
3/16/2010	5:10:37 PM	SiCl4 pre valve closed
3/16/2010	5:10:37 PM	SiCl4 post valve closed
3/16/2010	5:10:37 PM	Main Vac valve closed
3/16/2010	5:10:37 PM	Bubbler valve closed
3/16/2010	5:10:37 PM	Bypass valve opened
3/16/2010	5:10:37 PM	Helium MFC set to  0.000000
3/16/2010	5:10:37 PM	H2 MFC set to  0.000000
3/16/2010	5:10:37 PM	BCl3 MFC set to  0.000000
3/16/2010	5:10:37 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:10:37 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:10:37 PM	Tube furnace set to 0
3/16/2010	5:10:59 PM	Helium valve closed
3/16/2010	5:10:59 PM	H2 valve closed
3/16/2010	5:10:59 PM	BCl3 valve closed
3/16/2010	5:10:59 PM	PH3 valve closed
3/16/2010	5:10:59 PM	SiCl4 pre valve closed
3/16/2010	5:10:59 PM	SiCl4 post valve closed
3/16/2010	5:10:59 PM	Bubbler valve closed
3/16/2010	5:10:59 PM	Main Vac valve opened
3/16/2010	5:10:59 PM	Bypass valve opened
3/16/2010	5:10:59 PM	Helium MFC set to  0.000000
3/16/2010	5:10:59 PM	H2 MFC set to  0.000000
3/16/2010	5:10:59 PM	BCl3 MFC set to  0.000000
3/16/2010	5:10:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:10:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:10:59 PM	Tube furnace set to 0
3/16/2010	5:15:59 PM	H2 valve closed
3/16/2010	5:15:59 PM	BCl3 valve closed
3/16/2010	5:15:59 PM	PH3 valve closed
3/16/2010	5:15:59 PM	SiCl4 pre valve closed
3/16/2010	5:15:59 PM	SiCl4 post valve closed
3/16/2010	5:15:59 PM	Main Vac valve closed
3/16/2010	5:15:59 PM	Bypass valve closed
3/16/2010	5:15:59 PM	Bubbler valve closed
3/16/2010	5:15:59 PM	Helium valve opened
3/16/2010	5:15:59 PM	Helium MFC set to  500.000000
3/16/2010	5:15:59 PM	H2 MFC set to  0.000000
3/16/2010	5:15:59 PM	BCl3 MFC set to  0.000000
3/16/2010	5:15:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:15:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:15:59 PM	Tube furnace set to 0
3/16/2010	5:17:22 PM	Helium valve closed
3/16/2010	5:17:22 PM	H2 valve closed
3/16/2010	5:17:22 PM	BCl3 valve closed
3/16/2010	5:17:22 PM	PH3 valve closed
3/16/2010	5:17:22 PM	SiCl4 pre valve closed
3/16/2010	5:17:22 PM	SiCl4 post valve closed
3/16/2010	5:17:22 PM	Main Vac valve closed
3/16/2010	5:17:22 PM	Bypass valve closed
3/16/2010	5:17:22 PM	Bubbler valve closed
3/16/2010	5:17:22 PM	Helium MFC set to  0.000000
3/16/2010	5:17:22 PM	H2 MFC set to  0.000000
3/16/2010	5:17:22 PM	BCl3 MFC set to  0.000000
3/16/2010	5:17:22 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:17:22 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:17:22 PM	Tube furnace set to 0
3/16/2010	5:17:37 PM	Helium valve closed
3/16/2010	5:17:37 PM	H2 valve closed
3/16/2010	5:17:37 PM	BCl3 valve closed
3/16/2010	5:17:37 PM	PH3 valve closed
3/16/2010	5:17:37 PM	SiCl4 pre valve closed
3/16/2010	5:17:37 PM	SiCl4 post valve closed
3/16/2010	5:17:37 PM	Main Vac valve closed
3/16/2010	5:17:37 PM	Bubbler valve closed
3/16/2010	5:17:37 PM	Bypass valve opened
3/16/2010	5:17:37 PM	Helium MFC set to  0.000000
3/16/2010	5:17:37 PM	H2 MFC set to  0.000000
3/16/2010	5:17:37 PM	BCl3 MFC set to  0.000000
3/16/2010	5:17:37 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:17:37 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:17:37 PM	Tube furnace set to 0
3/16/2010	5:17:59 PM	Helium valve closed
3/16/2010	5:17:59 PM	H2 valve closed
3/16/2010	5:17:59 PM	BCl3 valve closed
3/16/2010	5:17:59 PM	PH3 valve closed
3/16/2010	5:17:59 PM	SiCl4 pre valve closed
3/16/2010	5:17:59 PM	SiCl4 post valve closed
3/16/2010	5:17:59 PM	Bubbler valve closed
3/16/2010	5:17:59 PM	Main Vac valve opened
3/16/2010	5:17:59 PM	Bypass valve opened
3/16/2010	5:17:59 PM	Helium MFC set to  0.000000
3/16/2010	5:17:59 PM	H2 MFC set to  0.000000
3/16/2010	5:17:59 PM	BCl3 MFC set to  0.000000
3/16/2010	5:17:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:17:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:17:59 PM	Tube furnace set to 0
3/16/2010	5:23:00 PM	Helium valve closed
3/16/2010	5:23:00 PM	H2 valve closed
3/16/2010	5:23:00 PM	BCl3 valve closed
3/16/2010	5:23:00 PM	PH3 valve closed
3/16/2010	5:23:00 PM	SiCl4 pre valve closed
3/16/2010	5:23:00 PM	SiCl4 post valve closed
3/16/2010	5:23:00 PM	Bubbler valve closed
3/16/2010	5:23:00 PM	Main Vac valve opened
3/16/2010	5:23:00 PM	Bypass valve opened
3/16/2010	5:23:00 PM	Helium MFC set to  0.000000
3/16/2010	5:23:00 PM	H2 MFC set to  0.000000
3/16/2010	5:23:00 PM	BCl3 MFC set to  0.000000
3/16/2010	5:23:00 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:23:00 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:23:00 PM	Tube furnace set to 0
3/16/2010	5:23:01 PM	Run finished at 5:23 PM
3/16/2010	5:23:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/16/2010	5:23:05 PM	Bypass valve closed
3/16/2010	5:23:06 PM	Main Vac valve closed
3/16/2010	5:23:17 PM	Bypass valve opened
3/16/2010	5:23:18 PM	Main Vac valve opened
3/16/2010	5:23:39 PM	Recipe started at 5:23 PM
3/16/2010	5:23:39 PM	Helium valve closed
3/16/2010	5:23:39 PM	BCl3 valve closed
3/16/2010	5:23:39 PM	PH3 valve closed
3/16/2010	5:23:39 PM	SiCl4 pre valve closed
3/16/2010	5:23:39 PM	SiCl4 post valve closed
3/16/2010	5:23:39 PM	Main Vac valve closed
3/16/2010	5:23:39 PM	Bypass valve closed
3/16/2010	5:23:39 PM	Bubbler valve closed
3/16/2010	5:23:39 PM	H2 valve opened
3/16/2010	5:23:39 PM	Helium MFC set to  0.000000
3/16/2010	5:23:39 PM	H2 MFC set to  500.000000
3/16/2010	5:23:39 PM	BCl3 MFC set to  0.000000
3/16/2010	5:23:39 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:23:39 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:23:39 PM	Tube furnace set to 0
3/16/2010	5:25:01 PM	Helium valve closed
3/16/2010	5:25:01 PM	BCl3 valve closed
3/16/2010	5:25:01 PM	PH3 valve closed
3/16/2010	5:25:01 PM	SiCl4 pre valve closed
3/16/2010	5:25:01 PM	SiCl4 post valve closed
3/16/2010	5:25:01 PM	Main Vac valve closed
3/16/2010	5:25:01 PM	Bypass valve closed
3/16/2010	5:25:01 PM	H2 valve opened
3/16/2010	5:25:01 PM	Bubbler valve opened
3/16/2010	5:25:01 PM	Helium MFC set to  0.000000
3/16/2010	5:25:01 PM	H2 MFC set to  500.000000
3/16/2010	5:25:01 PM	BCl3 MFC set to  0.000000
3/16/2010	5:25:01 PM	SiCl4 MFC set to  0.000000
3/16/2010	5:25:01 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:25:01 PM	Tube furnace set to 0
3/16/2010	5:45:01 PM	Helium valve closed
3/16/2010	5:45:01 PM	PH3 valve closed
3/16/2010	5:45:01 PM	Main Vac valve closed
3/16/2010	5:45:01 PM	Bypass valve closed
3/16/2010	5:45:01 PM	H2 valve opened
3/16/2010	5:45:01 PM	BCl3 valve opened
3/16/2010	5:45:01 PM	SiCl4 pre valve opened
3/16/2010	5:45:01 PM	SiCl4 post valve opened
3/16/2010	5:45:01 PM	Bubbler valve opened
3/16/2010	5:45:01 PM	Helium MFC set to  0.000000
3/16/2010	5:45:01 PM	H2 MFC set to  500.000000
3/16/2010	5:45:01 PM	BCl3 MFC set to  35.000000
3/16/2010	5:45:01 PM	SiCl4 MFC set to  400.000000
3/16/2010	5:45:01 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	5:45:01 PM	Tube furnace set to 0
3/16/2010	6:05:02 PM	H2 valve closed
3/16/2010	6:05:02 PM	BCl3 valve closed
3/16/2010	6:05:02 PM	PH3 valve closed
3/16/2010	6:05:02 PM	SiCl4 pre valve closed
3/16/2010	6:05:02 PM	SiCl4 post valve closed
3/16/2010	6:05:02 PM	Main Vac valve closed
3/16/2010	6:05:02 PM	Bypass valve closed
3/16/2010	6:05:02 PM	Helium valve opened
3/16/2010	6:05:02 PM	Bubbler valve opened
3/16/2010	6:05:02 PM	Helium MFC set to  500.000000
3/16/2010	6:05:02 PM	H2 MFC set to  0.000000
3/16/2010	6:05:02 PM	BCl3 MFC set to  0.000000
3/16/2010	6:05:02 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:05:02 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:05:02 PM	Tube furnace set to 0
3/16/2010	6:25:02 PM	Helium valve closed
3/16/2010	6:25:02 PM	H2 valve closed
3/16/2010	6:25:02 PM	BCl3 valve closed
3/16/2010	6:25:02 PM	PH3 valve closed
3/16/2010	6:25:02 PM	SiCl4 pre valve closed
3/16/2010	6:25:02 PM	SiCl4 post valve closed
3/16/2010	6:25:02 PM	Main Vac valve closed
3/16/2010	6:25:02 PM	Bypass valve closed
3/16/2010	6:25:02 PM	Bubbler valve closed
3/16/2010	6:25:02 PM	Helium MFC set to  0.000000
3/16/2010	6:25:02 PM	H2 MFC set to  0.000000
3/16/2010	6:25:02 PM	BCl3 MFC set to  0.000000
3/16/2010	6:25:02 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:25:02 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:25:02 PM	Tube furnace set to 0
3/16/2010	6:25:02 PM	Run finished at 6:25 PM
3/16/2010	6:31:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	6:31:37 PM	Recipe started at 6:31 PM
3/16/2010	6:31:37 PM	Helium valve closed
3/16/2010	6:31:37 PM	H2 valve closed
3/16/2010	6:31:37 PM	BCl3 valve closed
3/16/2010	6:31:37 PM	PH3 valve closed
3/16/2010	6:31:37 PM	SiCl4 pre valve closed
3/16/2010	6:31:37 PM	SiCl4 post valve closed
3/16/2010	6:31:37 PM	Main Vac valve closed
3/16/2010	6:31:37 PM	Bubbler valve closed
3/16/2010	6:31:37 PM	Bypass valve opened
3/16/2010	6:31:37 PM	Helium MFC set to  0.000000
3/16/2010	6:31:37 PM	H2 MFC set to  0.000000
3/16/2010	6:31:37 PM	BCl3 MFC set to  0.000000
3/16/2010	6:31:37 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:31:37 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:31:37 PM	Tube furnace set to 0
3/16/2010	6:32:07 PM	Helium valve closed
3/16/2010	6:32:07 PM	H2 valve closed
3/16/2010	6:32:07 PM	BCl3 valve closed
3/16/2010	6:32:07 PM	PH3 valve closed
3/16/2010	6:32:07 PM	SiCl4 pre valve closed
3/16/2010	6:32:07 PM	SiCl4 post valve closed
3/16/2010	6:32:07 PM	Bubbler valve closed
3/16/2010	6:32:07 PM	Main Vac valve opened
3/16/2010	6:32:07 PM	Bypass valve opened
3/16/2010	6:32:07 PM	Helium MFC set to  0.000000
3/16/2010	6:32:07 PM	H2 MFC set to  0.000000
3/16/2010	6:32:07 PM	BCl3 MFC set to  0.000000
3/16/2010	6:32:07 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:32:07 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:32:07 PM	Tube furnace set to 0
3/16/2010	6:32:08 PM	Run finished at 6:32 PM
3/16/2010	6:32:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	6:32:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	6:32:59 PM	Recipe started at 6:32 PM
3/16/2010	6:32:59 PM	H2 valve closed
3/16/2010	6:32:59 PM	BCl3 valve closed
3/16/2010	6:32:59 PM	PH3 valve closed
3/16/2010	6:32:59 PM	SiCl4 pre valve closed
3/16/2010	6:32:59 PM	SiCl4 post valve closed
3/16/2010	6:32:59 PM	Main Vac valve closed
3/16/2010	6:32:59 PM	Bypass valve closed
3/16/2010	6:32:59 PM	Bubbler valve closed
3/16/2010	6:32:59 PM	Helium valve opened
3/16/2010	6:32:59 PM	Helium MFC set to  500.000000
3/16/2010	6:32:59 PM	H2 MFC set to  0.000000
3/16/2010	6:32:59 PM	BCl3 MFC set to  0.000000
3/16/2010	6:32:59 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:32:59 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:32:59 PM	Tube furnace set to 0
3/16/2010	6:34:18 PM	Helium valve closed
3/16/2010	6:34:18 PM	H2 valve closed
3/16/2010	6:34:18 PM	BCl3 valve closed
3/16/2010	6:34:18 PM	PH3 valve closed
3/16/2010	6:34:18 PM	SiCl4 pre valve closed
3/16/2010	6:34:18 PM	SiCl4 post valve closed
3/16/2010	6:34:18 PM	Main Vac valve closed
3/16/2010	6:34:18 PM	Bypass valve closed
3/16/2010	6:34:18 PM	Bubbler valve closed
3/16/2010	6:34:18 PM	Helium MFC set to  0.000000
3/16/2010	6:34:18 PM	H2 MFC set to  0.000000
3/16/2010	6:34:18 PM	BCl3 MFC set to  0.000000
3/16/2010	6:34:18 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:34:18 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:34:18 PM	Tube furnace set to 0
3/16/2010	6:34:18 PM	Run finished at 6:34 PM
3/16/2010	6:34:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/16/2010	6:35:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/16/2010	6:35:51 PM	Recipe started at 6:35 PM
3/16/2010	6:35:51 PM	Helium valve closed
3/16/2010	6:35:51 PM	H2 valve closed
3/16/2010	6:35:51 PM	BCl3 valve closed
3/16/2010	6:35:51 PM	PH3 valve closed
3/16/2010	6:35:51 PM	SiCl4 pre valve closed
3/16/2010	6:35:51 PM	SiCl4 post valve closed
3/16/2010	6:35:51 PM	Main Vac valve closed
3/16/2010	6:35:51 PM	Bubbler valve closed
3/16/2010	6:35:51 PM	Bypass valve opened
3/16/2010	6:35:51 PM	Helium MFC set to  0.000000
3/16/2010	6:35:51 PM	H2 MFC set to  0.000000
3/16/2010	6:35:51 PM	BCl3 MFC set to  0.000000
3/16/2010	6:35:51 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:35:51 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:35:51 PM	Tube furnace set to 0
3/16/2010	6:36:16 PM	Helium valve closed
3/16/2010	6:36:16 PM	H2 valve closed
3/16/2010	6:36:16 PM	BCl3 valve closed
3/16/2010	6:36:16 PM	PH3 valve closed
3/16/2010	6:36:16 PM	SiCl4 pre valve closed
3/16/2010	6:36:16 PM	SiCl4 post valve closed
3/16/2010	6:36:16 PM	Bubbler valve closed
3/16/2010	6:36:16 PM	Main Vac valve opened
3/16/2010	6:36:16 PM	Bypass valve opened
3/16/2010	6:36:16 PM	Helium MFC set to  0.000000
3/16/2010	6:36:16 PM	H2 MFC set to  0.000000
3/16/2010	6:36:16 PM	BCl3 MFC set to  0.000000
3/16/2010	6:36:16 PM	SiCl4 MFC set to  0.000000
3/16/2010	6:36:16 PM	Bypass solenoid MFC set to  0.000000
3/16/2010	6:36:16 PM	Tube furnace set to 0
3/16/2010	6:36:16 PM	Run finished at 6:36 PM
3/16/2010	6:36:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
